ࡱ>   F:D`MC__0JFIF,,C   (1#%(:3=<9387@H\N@DWE78PmQW_bghg>Mqypdx\egcC//cB8Bcccccccccccccccccccccccccccccccccccccccccccccccccc"1!1AQaq"2BRbr !1QAaq2 ? @((`Pj$@p.0Z TP)<0+Ef|lZ܄l!qs4nR ӼP   PQ@Mƙhb9&-m94MJEO.}\hjdsxF骴(̱Tb=grMJDf*h.khCS,ЗbQTѱ(DTwNnU37n%T:\Лﴛ._pE3L/!gUqt̸9bo+ STx)wΤ=ƷS7ז: Ri%k-)* [QtzO8zGphrbULZM"_琥[3a:2E+m: QQv)iq1 ȁVmz)q͠!ӁGobue A`ZQ`-:vю@#s} [+@ *=FhиV_ 8ox%^=; rwޟ)/"J\<8iˑQ/C5~e&QSNcM0b4QG2.-=QOA.qd%-~$6qNmҎ`hGwf-{.:jH6O/ GMW1"fKMig 8c$\Q˘^FRPCn!Ϝ];s4^ 8"Y _G/g;w3#r ;ό9z)?Z> zo=3ܤRؤЩ)U`D\pdk).åu591)L^H8&!;.šp"o}A())}{t'K#GWN8ӑ2/} vIƝ?ork)6I0IU0l 2] jbP⑓LŁ* 48G! Eց--%W? D{!BVRĪ[9 mI<:K_ҕ]AwƜn\0e*ћHWcd39s"F# Tpu=G pl "8X{@%\iȫ hԵ'/GQ ItE ? h,LMi&X׹`P˞eTRcp ByB8maE]cT_])3D#AjkMܾ.3. f öwR+CvQĴEpt]O4ҝ7 ؜g:PxhR-LJzr ?3 ҹf{#YmBKS3$ Y R%/ȓ^V)| /}aD-zCJ#6ZG =gPfDswDxšUuw2.s /kše5C-Ā|Xr@OV- Qg>`Pc_B )c\÷8z~B p[*^FzHMpJC~[gkh 7C vKS{S/lVfhgOTvJY`ƏiUeMg(ipQc?B^usg ]'Ci'n/̮#)r/$ͣ^a.5Ҏ\:o?_ӎ3@7)5uk(Y%$}O9q;Vȡ:iaO;m4D]]kg!i` 6;xW~J/m?D O-&'v T4r$RRQ@)tiХTl.) >&j|u Q -Aw"xP$ j*uz;(Av [B#U,#[Nz? bF88CnÈ66n("ዥB`#T: U{0k̗Nڂo".|@iqg UȣA5 1rel8^`Ӟ\ŭ]^0C\N%;Av, >^r*̎UiHRn -;/Rn ,.!͵3Quȗ.R"\ 1&FM WFfoPХQ R)T&̦,ETwO jۋP*e寮}76IQfH2UL;Mi}j29ik篐 Wx霾=X)xҕT +>gt4ϞfZ̮@6g7Y|< 2Kw]ϟs3-.]~ ,\7^qչy.J sӮrv'\k|jϗ2x;7>񜂩N3Vu&UՇ~`&u];(| hU+-I.p\T."f~+3<*vN~DŃ֒q_ߖF\oq$7$p(kc A]SC/tYo|0ڋK7睄uL^:)@RMl3Byxߑ\MMy \*?:._#;t`Bw|-4Zp3|󑢦\{Gm 5 kAQ Uן'Nuˇ}gOl뚚T*&6O^%:,egBgm}4@S{]f{Wgٙ$f%{s{4Vg8vq\$'h*^<4*/F>΀JBzx\6`8~K{-- `{$nr{+h/6O@Hۘ${h6[Obֶ1y0Kk}7PtٽaoU/٠ҍ,xs?mmVg0{K#Qt l.Q:m$0 (1qR\ T.5._?¼J5RFH<xTFv3~!}w&~񚦭._#H QKrKܗL%QuUZ'ƙē|-9ܖ=Ěf'8ygRWٙsQk5S9T-IH/ZœRR u5XHK]Yj>gVDJ @B72J6zG홛mżJҸO$S|2ZHnbS)Te3 .@ʚ7CUPKHjυbR\ R5R[Ԝ057gv8PSא*oUۜ0vYU;o6fn|̞f1JK? ӷkmb>*ZݮeU/uԟYV^l}ĩnE5SN+&kV$ 3.GQMn3rˍgtEKEKV-?Dߤg%q*{fy =O 8׌r >[[:,U ”"hQmQl%CI-v es=q}Y\|=TioQ9F;^*|2Uu*%BvrS{^+DY }q$Z{fXI[bA5k9ĨY]I&,Kz4{g"i$ii&{.Z|*'/Xjtyb~sKJw]=7'n\fw V9*4L4me[Zw.brc'3@_trD:Rӱ?RI 6R ڣDd:G]Bhq=$[hw^!!K>TsN3; AXW ħȢD>fn9۫_ Ă 7J~mWqn9q-N+kx|n?`9J|{fh4xs+f~ N|4:ht BZn)}F)޿$ョ* Wa*'oqLD."-S Lik*s@%eay !\H` T7- PkHmm%3|˘ίWZUU*t1nzƳZ_sI5.3$]H*+GYBL>w_ny$s:jȥ_q+v|KQ u3.hИe#*JjTǂZ[y΁ŭ)a*tk]~ IcSOF֓"tXA0iI3?ᾷCQwQè8QŬGs<:;-4w 834gAD[h@)L"smox[ďs@t&s9!$OH*{MHO"t93AŞؕMq;5k3GJSx}mFg2k5)g4sڊUy~*~g(}Uwݾ ug]32FKMwq]Q f:>~:;{f~9-8\Rv˔Kmgzp[d$sPtzh4*]36+U?8Y>pU5]3JZX\;N%MQɣF՞aFP(Sɛ:TͿhJ;!4*m; \ϸ({;̞| r8K4陱03/RQ9أ8|\-YffMfHB Q5gtn ̵9qKRÅ2WxF3`gU9ӝku9 3≍5Z/`i5xj6]H57| i== 7w?}}4k4fjƚ`餣i; )k=rqy>YYdL9h>}$)'+T*ٞLί3wG4Q@ Uyޙ9` KO Zc^߰GO 1}`I[lmM*֝^y1f{ nݢdt/ᵴRP:~ u={Ԧc]sr5Jv4)731n_\9K*X^+ni<3,̝Ks8q}|5+, jZ,C]qJ9|zoms$UJo*NĩU2=E4Y:ng/|_J[ȇi::UIRb v T{D3}{~J^ިٞznԢ 5qi{eWs1k!)}mUVrSw&ioQt=.g_g,|_Wˑ˜%J'bܨ\}qs?1bÒ]m۞ -߶u'~DPֱ%aD[Lu~ġOBnu~BwJT(_ۀص,Dp.gB 񳍵 !TN߂wV5@p5.h.ۦU? +Ft֓qL<4ӷTE5ƣm$YN9ȇJN'RuSKw_ؙyBBZl4+g"Q3x8-2{fuw}42dfWrR,GjLOs48qҚ+4*^]7*, T>\\\•oAivIKQ{or*ܵq>~ W.hiv8Z2@VY[W.ip_ t+s\poī_#㳑USkuG&fÉ9gdρ;:Ë:sWw iK RP@Tt~3p/Of]7"VuӰygǍ 82 ?_E6s->f{ 3N5nEpxS|54IL [J qyb.Bw%o{$6%J\*Љtn>Jl|tpRbi&%rFJh|+.F|nAzxbIɆ+:* W<|uG2jm]k?UN:)bM%:poNӦ1:{(54Jw8I&jQg?\ʅH|&z}sT^m0{9>7ؔ=7JZTsRthJ}U*lr#[϶{} >JP;_? j; ?&kp;+.8w*@i}OO!E+ߑsO1U9=?! Kv{*MS ZH ]}44̠ S,8_"L&>vqm:y̸=2+5Ah>wa~wh9\AG&aÏP8x&xPS[[V3JV@m~tWṽ5M 럒A+r^z}NŪG qZ4;t'ߗ Uj9p!Lm5}sL"8tƋNwO1pʑJVsiwZ߮v7={42D]Bh`{]"Lz_3,h}V̂2Ms4oi i>E¹%WKv*d*zn+!>m=#S;R^STwgeAUKVVV](~ͦ7O$cKpMܵIzOKRh3φ\/`r2`jigtg*~s-:w~/ %6*J[݉+J?qU6U{>myJE找aQW!L?hT^: wzF#䋃b'̸h&X+g\@ڎtºf2 Iּ6\0.駒Ιqǎ%L_=Mku7 ~賄Zsoɛs=s*/3H´ZzAI`)XD) R6B}O6e Q+q}7̴d;&Ծt!AƷITt'P3Xt! Ѕɏ v!񟀖9 ܤQb]0Ar4fZX[]tnDYWk\sf`΂M3Rf:Sқ&BuO؅F߲hi韠歞S+mЗ/bDku6rS95@/N^=M߻N϶R=_ ȸ?I@T; |}'vFgoJTqQd\ipZE'9'Q1ӐTt[pⱪ )F~0֠z2ˆZM#5Ra8q< Ѯ@+>%i7LEiJ6^:mU=N.RYD p7?f: =ck`\(.TDԨcJK/f\Dt%޾┹DTkdi^ Uh=7I%*c7aS*گU$s|Eբk35S͌uwf|{6c->+uo=.-ퟱ);\=W0hEtXt[9cQ\ZN_I/VOdf?J7D7l%*ѵStqpitRv.KLcE2^w ]oȟ[JM+y}~mmoCg\ cTO9ߞ}.^?Fo>RW[L*i^] =R4O|^N%O nYj(MNP^oI)]kU4.\QWXdox%e$Ji;Z-c8'95_ ʶH4诟T)~Y)>ĵ>噚 TnekbD~=Oƙ҅2=6.aZ,ιpת]H Z/[wtyOɿa}8m3ɥ-.]pt˅ﯶgTf|\.N ߟ*E[Rg8SKJ-s; o3~[FfJ=Kh;om@SVnඬ |q p+S4j>%O%'%FW[f-sPNtbUYϰ|7Z N~ShgT +:W|k<.9+8\.*W6O\ pѤ/b~Ί< Eo3Db-*.PW P@/RNCs#k+8,ORg9,}rB)='r];>R_ֱأ87U<վpҦI8K5w}okBu]>mN[^,-ӛ.BUk-/,WSJ"7O$\KM.z"Z/,Z3~܋t'$.mG6lEK[΁k= u`3`~Ix)Zio_t)Dt婢4!a7)Q=Ȗ0ۙPн4 r&rI?I??N?@rU)l4htQQ:kCWZψr~VnykvsSMkOI8lOkધbZylܪor :ii)}F0V\$Fh7W5@Ш\Kd"*l%?r{y1}%nR]*]`S9rJ /}gl!=_%v4oF.&]=% Rϕ¦cpZzHh!!%kx&1>ZS/fHջJUMhJ[<%RKV妺eŨ*s=MS54:bFg᎘@iKFkM5%[DF2I5xyrUW`_lQv ~bu/wZ)/3\<)=?Bo%M!P='<|ϐF+_ƚ?U>8f`ѤDtMixKʏK4>PoE} ih(ʚ36)z̔QrYMiuֿFSCfedGT-o9&wpBp?Z*Qmx^̈́%w)4NwYȺ_&KRHSM=:9P}7d)Vԟ~BKȪR2TԶfkJNb Riߙ cNyȩ" t+%ӯk\7ktQ?S jR^3]6H)8C]*Z,ǖ[ 5ۨI iD=JS#Uă]~ t%Xt4ⶲ&NJ9uigq*-s14nu.n](nlESї/}==y$=\|4"5zg1_MECZ&-%Ԛ\ UCTu%VKU'n[|*׫s ZN->١/Tc9 Lfrt\s5 O=-mfJِR$U@TH!.LWkV6,"ҕHRוȤ1Zpaqu|kx%KnX Jy*\V4ް|"󰗩^~ %v;kFf\P>c蝳-?_>k.y%h]3}=T|Иi>O;R)Ήl}zf~H)={oF^Fi.QƂBkH*cٟZ!?yόۆĩ^l— ZJ}f-g>tΛ R-U)SH5~P^r=)}3j=D5K}5R{ЕMhFfObL$2] rk5 Q 2.pt8DjCI 駮?LܒֳuMjMCZfaroӌЈ/Z|89TD;ؤ=6jTŃťo åب Nf\frz7VȠ%+x R Riu/*h]5:tk+NMT%(;C/pl͆}9"sI|sy64⋽ 5۞t"qؕ< {ܵ*s3RIu*oJ pO6I:z@ϳ{^5iy5Kդ`I;3?>?{hpqSOMshV゙aDfATĹjL%gU.-w]3~3Oww Ks1q7*biwzBO*oRj*@zL+ѭ>iP4/QU%x/I(h_3aB^{f*;r_֟9㡪9NINԑDL¿՛nBhO\i=Tw̹ZU5ܵU*ctjZ\NJR}5UCÌ@p:\Z@R4ڲQrҦ`tBΤaԉmv!{FMTO/MlӸ1!6^Ʊ/S4]Ikc*sMJ^k\PVd Pg{Q\ŵ zio_q:٬̒nTx\m>[A4-Q@M5?&ԶSA}4뜉oxky ׉-#%ĖE=֔ :z/n 6t~hre8}-M],}SON^@*]1f\NjBUFVGUb</YU-'g1CT%XΙpZs2 ̿f|a/R65iD-)|ʔf6)kIlke*nnKl55+tƞHC]AT'@%V̩rCMѨ*kRN!k`5R$]33q2ŋd=`u.ы{d=?b)Yżs%g2 t /k jUWU G@:N>IX[ A1`Ni 1$)v *lE(q)Vq4Bx'{۵a$P X\OpL;[@0yu` /}UgB|Ά6\$n'U)TiLZ$! >'v.4}g;K)*N^q SVqkx'w}៷ _]ֹbuzNJs njpZ5!Voɢjb4 t ~ѹҗۍu%U̾\jQ:+…K\cEU= T]qpg~2 3Q03h^Ț-UJvzzM3+/R?MƲS+rJU FRmQ-a~GBӥo<URj媰DRQ@p>d?KY40ቸKOSk<+iPKKЮ'ȊmN'SuNiDО8Xj(65L%WPm\\ T3HJ6UqBR?;Dd m Xz@|؄8]&\HaR.95K+5\lRqgv~\Bx`Bs.yR̐UF>:y" z_]SThjl8J[NH &k:SG>h\< <[ber%hJ|( TޞWAiy#*J͌_M+%> ͥ6zy:ogW .]spKtY+msXS{ι˗M<*jTxȧg=ڵɗIb ͮ?dfKjƹVP6Ԏ泟w n'nRU)"Ur?r Vg1v-T~3,(OL L~rY7rKTj8NZ鵼q梧OJUqd}Ӷfno=+ջhZnWj*%ПB]B9+ul>;H W%"_2fRf^2I5 ]{Zω|R] [M=hIJXHN94Hbb9ēMg@KW>*Z%4tfN2i3a-:fd@*ˌALM7);w L|\E @$H" |`ȧHBnֶ+Bv*t„?cqLSq G=`)p*olaWbӞ1G< <@gi0o:ktU>?4Zmuju5-nY3;55tAҬۿ;y)n|u{S;]Ӎ'J=/S|3~ jzf~D{$l-o6Q3ܺ=D)t}%ܝh֚#O iK~^t]P Z՘Z Pf1>tҼץ:i2 U П'OKenhra(>Y݁SNJ)9Z$K5J&NUUOSsp7@mg1}5{k}gURʋ=Od" J{\I֤'!rkA%B^jUB|hn%|TU> E¹GE*\=h 'Z"b,"Pi%6* .Lky=ΪlH+.6V~D!?Mo*kr\Iy$*YIJvFr>x*܇E.uֹۗܟ;~B3SMtW2Mi8mk 2NJ}Iܚ8UTBt~ꮚgs=ȍ-r!͞jN7y>^;8۶f/iZNuf\ZM: M~yQ^|5I{fjS3p4mmB9V$ԗ~jr}P%#?by y ܕpT"oNZm"/+̀ ], :q-|1p 9)q9=t 3p->J%g#S3)s=ērlk_RZG8nCpIJAhI6;-ߟJ/? ԛZ9U<Fyw~/yGє]39mkN80⪉QRh.J5U)4~qV';t :b=IlrD!$:!R r~ڕ.yI.4JTπLp+_|*JTN9@l=CRֺ[ܥ*Hkː˅]kcaB[!VzUKa}>Ltt3(tRP8 k i_^1Jˁ6V)IV|\[8ӍB]#! rBORDuذ-]䧱P_Qr'pBǸ̩!.JXiQpJ]:eWot AM_]'KvRQ䌸X>9 K7-7ltPrģ*}*o s:cGTP kᛵ+m6e5_O j#|.5_a]L{rhj jt5nrQ?J%~dJ ιӨ 1eL5,M-JV@D^bjT+w9ς߾rM("M~^3:Ƽ;ˑ.r:qwa5)U%kk=Ʀٷ|W~ߢb='=V~tG#=u]KQ9rlnֻ3تj\ ;ϹA(Åҧk2^hڂ]r*k}396^ٰT.gjkU:#K:9s$q-*$'FJA;Ҟ”CDO*P3UphS(T fhMn%T.Ƃi6)j93{ Z AB9@A.jh|]X<0`7VM kmuK z8ZĴO3tg5=ˍ*;O/Ӽ(|tד. &hyH7%(ؚkdJ7LͿo3bi$t\;ywPjvZ?:i{>`4~h..-IOOOhxxoKrl&n(ΟR~>zMgiWlٟbvӋ p$RpNuzU>D8ԧ6:'Og@7Z|vW'"f}TUNm37(4}y5[<qUO01n,V7bp֗X8C\*3KHnKjݙF%/ ԑ>JrpOV@KfOkCP Y*ԥZSIK g-* 4%jA.]-ij8ڰ}Nb~1k!_Q|iL_`.5~SͩZA&}4qKRAIeo rM ƀ  P/ (9a9@3s-D\PR׸)r(Aˆ/&ג7MGm #:Ȓg ?"?a%SsשB.ZlSd2KJt[v+Hfj Ou%V5:[ט nWiG,i6԰%RWS9뮏SYw{U56~Tӽ+ؗBcEyy1Tt~6Smt zG3dgOMۚT,'馡 /qAf*x-lg(RrZsL H)[t3છrpu:gi{Oi6Ry2+X?edWSnO2ҲvѢ鏁sd?Nlt4M1CxSWHF24S!IT΋U*" CBjBN\vB5UWI.5KHfj߂/ _Pn4EZt$٠IlA|Kdpi&`KƐpS{Y+*_b_ՓD~y5Egb tkNdh+8ZV⽞gA JӔ. y XI_~(MJAӧk-4_BjQJbns<;n*)]z U?+tԐPOPV:|hNO7ݤ~/:^GC~$pVࢦ7 ZŮN5`I^Uԕ u%*UZ%z./~~ߣ7L,63]g:W ^~uůƝ1 PRf!x?+^nچ+= IXa!J90)p`x 9{r$T*ds t &>~]E@R mk`=_ѫJnl͊ oVmY\scW"7{ rg QכgB\YVL|[:vW'~YVT_Mfj л̽z$#37 jj=T׻WDIC]-Β5f r-mo?9sL%3Ej>3?{OW)ko 8=6կlCN&:g1lQp)z==T^}s3 RW] 3XV]}:r[ꨲo5UME%7T\oow䤈k͍֗CъdAW7᧑<QOKL2t5dh$# Wkmgt!ٓKot)n_9>Nܳ<Rc--GMnt4\ԟ$:kMIRfnQK[Ff}ƪ[E!G+ `Z3N)Wm's:­U;ȓM ~ŃDf_QstձBD?O'}@U`Q zj< >1pJ; K2WH5\ŪlOw8EtHR=  %0ԖhZ3Z}D?MkM@, h.*NTuAE*gQt1)k|?QEJ˘\}'Sy>:JI \y -r\K)R| V6 z6]oW TK6R/z˦T@T&魙`t5pUGI&f[}%_AWֈb 11U5lZMŀ':Y?M2-d;tnO fU?qU馺4V3Z6D7+]sȖW˗6:OUlV2_`'C$}Ⱥ.@! &4BtUH* tW&DܖydQhY:/08c{ AURRZQxZmEGf-rjWE_k5 [:ȸ럒ҍOY{9D/UWEԨ6䀦S-?MEui洄zy2U=<#3.Ղa'gn| VkӅzb>Jfy.m'sO^ .wf{zSf}II=UJ}W-%~K9t2_Mx1Zib (I$)v-S9Ѣ|-M^]gs(|Ӷ5tD uMt9y/Sv7ҦKU&ߢO<S;7]K[~37.U=Ndh&rx&CyfKs'>4ɥ+}l*RbSb] JRUR9C* ƚZRFJDK1}=5KV%SWDU%Z8R!< 9T&Us@hR)9O/]=2Tv~U4lKU"ze/R}:fcW,C@3ҼbA s @*-BPh 0O%B6c`SȠxaYܰ'! zU@QU&0`pZ~Th(RnQRaU Ii?, ꕤ'Ll 㧙D y1ˎL: UJ ݍM-wFi=QQ/u-WK}$ٟi/XV O~Y4ִLf[_ZR4SȬ=T魤CF"c5"ct*azLUdM5ɀP gWƠ7q I'< ko/QDعOC/æq5݂M}^N9^eÊ3oKfuf5mɓ/"b}a(␙b|l`E :" @T`Lh—U:t "'p^5 :hARڒ_bӇ+) NW [2tl-1k: =bZ[b{=<䐪mFۿIpJˀEg!C{G1 5:g5SsJtDծA<7gL\; q7N4&UצSM/JJK]/Ng2@|t="s>MoPKMQ/{^%$/ܞ< UgUOPCI tRޟ៧R\5m҄3P~IM;R_>[/ѝK(QUL>LI6IsKWKrʝ H[N;*V\olHFN>ԖBtgmʹ ^c^/N_suJ \gO%>ƋL&RU#K{v*Wj{% Ҟ~ذdsw6v-ZΟWJÁmc6 xΆI54E5( ~<FNLUNDSFAKP?O"_~h3.Mq:] JԢjp8a(".R\K(PUhP %TcR\5s(S®K‚O OTLpϓ@eo).y/``C**yr(-;E/b t-a3|Q4ջrDV)ŦM>l>;(,CQF/ҩhKUFa U%-zbT; rPfkik6t U&ETD4L3|o+TE 4t0(DC[OTF5J`4~ uS1,kհ8xi EUr ]3dk˖$j:Hql]tW1bE $A9%D1y09 ]a6.L3!@Ja%+X|-ATѿMnU5E´q~Ke|<*kGO$@D*WK'~J&!r^LWSFT)U?ZOXšk]7>ߌD5jJqjyPd}.4؁/j%5jTO4=D#[y Vw{3-[x]6שt/5'ƚ4 ip!1[LBS4hQw|@ 9ԪR ,!ZL~W JПZ͵Z6J_4J1E/R2 Rߢ] c9 }Nbәz]5%MT_H?$H^r]Mn(V%VJ\+c:;CS,;3~zBVn:WV5cJhW _UXoUmEJ:v"Fgx!Q?v3uLg<ֿe2 jӠ䈞)WzmKFMsreӳլh]5 ͎3JvD#vؔI&\OF¹!pJw T<@dkDRN^$`T:j[hM?BD.`0 BsΤQ/l4XO]BGXqu` & $º<)hW"1pBJb@!V̢Jqo`QMFu8ӱH*RAQW9}yJK'(Fc-wj谭I'?R${ M'Jno3CIrqwCZ@Z} z$Sȅ\$Hp!C OkI6&KLE5ZeI]ER~7:}Mw-TH`5*oӟ١.%\]-^uWh~:gQBMrLU. ѽHoRxڗ5T)P !ژ `RHH" `# c'fGzu",zj&*OU7~IMP%M@Ok\ }!qs;rS7)j!  7afdiiGMmr$U'mA7}uBU+9s92Sg>s<JѮ(m9[r jN[YO *.ms9-%|jg8ڞȭgZ' ԝ$FwhKI1H\kGȚV CWRdCWwC?.i^фUL_Uce˪ske^k65ASkoE9_~TMv@5rꘪ9O =UkSЈ\)KTH ҧ`R] zj'?O:m a5akՋ<l&2~G/KOk_3LITB׫4S71ѥ/Ht4URIHN NsSERv@0juV~3؞N(RO@[S6NW/ +XQC4О` kK@qAp{!p P`M7r(Sэ9p+[%n@0x(OA WЎf5+y((ՇMs[ pJTh}JKM=^b{{Y?N?󮢊Y.MV#J~OKNnOӤ2B@itNKˁ-JQ6%Оy~'OR2>Z9Db٠&o1Աt%NFt?I-Mk>SZ[k\׹_i#ͻ_;kN>$E<*jO\!kCk>T"XFð#DA&.50 5PR1 !I1l2` 199աG&9"m{&Rwv& U{…iفJiSg~yG߹J ~1vf vo$HNKžimMo 13apS]Q\v!R9&=7Dsc: *`.#6PDKp'ו\KTOOi[$"xjYILpq(%6٢W)N32 hRݳ>*hOGKTJ};.}?ݦ o:kO\>ϷEZܳ?d?J4ypUQ0dcJIs [3:;}ua*eOݼi#:TĬyZM)<)SV)w6NOF%Rw.Fuzj:W/U77>6RjN7TR՟kӥ;,S5U3~gEJ&j@榧J/kי l/Q_X&Q-,"V.Sj?=K|3<SL ?Fj0΅`%\o}T6K_0TiOfN-;d+c. ߦ7i–Z]>{kNET$}Jy- .,ߵV?9AEE*܁.(Pb  ]s2.HQS*݄X%nM-EPKLʠK)MP1ڊe pD(P[u+)]1O /eA@Bs+CCx;g @iKaǤ{9f!T\gJg%Cg]*g2邭!HlsVsUXMP@ &UϨT[-UfnkN5F\*^>ٟ%^ V4ԯ1Yi$j ߱.LU5UטBQ2&هqHH. @sH`T% (&r H`b Z () 5W1L@-B4_+RVkik@7p<^)5(αfs /LϰDS[Z'3JZ NaMs*prK _5KIZ-| /UP'5+fnhlHJ]gFPyi{R v*9A4ԣWϹism?FoK0j|:^^eYD3r)l3J7i럠.:k w,3w 6VҾ4T)_s> צg7Z߃"Rv>ң:F Յ+~M)^5훉i9j73*ڬt*>КEreSJ5+j/|v8|K=;_M,>Jm xT^< 8NSmt*nkleYqk=ߤҳ~y:R7o6WdS7;N^/}4[[4KqdN}wCf}Xz-jYEZ NI^/Vmo܂jkɘҔqY+ۧWŒN䪗uBhuM屽>Z kżNRhr!4v3:ҪLg* ,$}^dp!zNH%riFON>l V(š+t =IԺ:oe~H If(ţR]oAl*RTgEJ'3h@PLWA5MMX*x` sr} k`65[jE42ɡB`@O0`&Þ`!A+װÞ'-ZUO@ORx̰74umN)U'?Ms3Sdn _rSOMTШ؇Fc]^ ӊ j25Jp34*QECHf暭1ɗ [M>)lpq7?G`UGO3=Ϝ֮N%RY T%L`iGyB- 3 (C Rw@h`) -C8H!MUt`:q{] &-&+С@Oo"\ߓ vNM_4¶/M8T s+/ߒ׫3/WJzYԏ>PWziMJsEӧhI]H;j^Z}FӷBAUU$j+6lu7/ӧװb8s<e񘎠-SZ )i{*M-~Syȕ_ISRM^m)o,ϧFĎos5UBf!fϓopN+eR@Ȁ @ A\K0b$f{ @ZC0* D zR F- AKF;"yfH]Сs6ƹ# ky.;[<•)PKU. omo}oW횐C5&i+kZ&a%O@ߍ9w,X,%^/Q3$]2_gGKzgIZq=;fus,%~U"Bz&U^s>ƵU |U~v. \.7ZN3JwyʨrkK_gDOGc=k'sZ=EiAt3B զg!n:XPJ?MK8ܖ!izDXtBxM^VqzsºZ=眊)n-4ٯgn_oҕ9b+U]5)s2驸?Χ/ i@X"J[f\2Kn,U7Τu9hR~ʦiYsQ\G?1g uY|~Q›&[^^=uܞ\%*=N-ny\J}UI~/WmIƺU'S}Hv}GS~a7qE\iZ/=WrTDV|68R2~-?I%JQߑꍌ-OqXqƖd\|gsJ(K\*܍Ԗֶƪ_UiJեTfRO?^Z+q7_UW/R I꤇~恷01TULptRדQ:UZ%z/ȴίO*)J[3i&@O[駻Mԗӧpk԰}5?M^.HvL i~KѱJ^ljZ Ug<g.:a"U|\ t-tj3%jb8mLwMR׹SЕO?l=>5_~VX̍SKԼOER8.3us.aZUUc[]ux.tg;g`)c k>E!" C\ H %@= BGP'-!QC H 0  i , iB-Jo- \"GJ- G`m/`J@l8JOX+rA) U;r.摕}3w3$RkHmr̀_INLҿɢi\hUck~`}MxZEif7u+%uӗ:qhO?MZ4iCig}Tй%XӉsqm^wÉ6!T:lTMSOt*ns*~Ժ(2^NRNTo?zxvRմ8Q0Q5eKPJt)sC5&Iˬg:Zz|ʗE陠S\+făe6R2^o [\-U3Yqk}R[<؂] MM&gHs'|[jĪŵ0w'M3Z1N4OY_lgRKy2>ʼn4O&z]R~+wUDUJ1 [EtJX}h?陷 ߦzDS&hTx|J)^]`sS5߹>MXiL1t;rΆS€.ZUQUF*m^/[IE^0U&3MiרYr-T'Jzk2 ~IZ*M'Y?Nߢkm6-D7%i=t} iuP3KWPLiπ=R5+?mȼ}|MYDeEI<)|L0t52=<A 2\:rƂc܇R7%׳Zn Sr*9?T-bJ?+Ԇi.KJ7v31]kRTۡUG7;g|d7>1O薟9jqj!3sP @ $ @(1y$((4#CMȨtqz)g4-^t)+{ĵa\l̰.hkTMSE G4!eO֏"s; &׉Rz/*)Z†k+<K[!NƭܗV] -?<$ msPJV\3Bl>(B5QkeKIMΙz] G&<)iͅu"#v\9v1UԦ5Kb׫u7po:^6sn?tfMoh$EE^=baLЊc4⵴C\$TMQNtEJpۘעoPoc9(W|bjQbpC}X4UҪ3Lk3JW&k [351{eOڻ89еJ.CzwW=[MssjcQ| 2Iy铖EQ&Zx_.%?oȣuSiIiʗM:}Vo$WdUj_Z_Q5&.ꫳzt%kt>S9J VfI~\S{;ԃQdUT;vsjopO3hZzʥ36,?F&Vv3Mh-:i:4w~sDt:}TjIBqxVn k%OJ1uuB|Sɾ_ i]M[3hͮC\Os9SRi1vt;~^kWiO MJaOq(MMk<WtUS&f]5r;5(m[6.:_+2PO ]7iDXKJapDNue~¡!Y;~M-[dVծh[lMTfߤ_M8|.3U'g1U- [Jb鮕J﯀֋6w_pa%?MLBf,RKf"Z *|j^aE5'ȥR}.ߢ#iWT5䪓vBĤ W A2tFޘ|  n@h1{@H@ZP2zE@Ph!B|%%hK*=l їM3?%KiaM н"6NiWБ*in37*UÅ{+tVƗ3 j-f4Jf%ؕO*iy% 00|JZi$BU5JX:W -J?tc7F+'hnF3 kb &m.9TռffJEf%.w_%КzhMTDk>܈tv:kjs9ԓ*-9(^;fę:V3{jh-yeMMknf|U>W=,xv$FiMug^$?B7]LwbimUΥp'e3ԗK Kk,Htԛ[MO Kh!\|Vs.cO?n抵Tƽ/I 'O{f<_H.1q=zܩsgB顥 t]sF+aU6{ۮXQ\>~Q^?:jO}'fjjMhTW6r%U0Z%2Zҿܐus[eO6}T5j󲿌j{-KnLj\hI69>4.*[R⪄U`vK}z R뱇hDSa~CoHU57ۗ3J}hGJQ gO-T :ӥ=~Yk`s$ҵ2Quiߖt44bh]5i>Q[7ᚢl컅t̫qt#En+P%VT)TxtgجzZ7J^W`)US3n}^^-yΤ?Nfdj%) =_2J,+G=V1^/T$9+3=wP i7ЇE/E|$d7MznL56wwm^wRLԵuPgcZ t26}tgr%ӰW*6` Һ5k)4Rk.&JBQ3>(M[kakǛ26Ԙ4Hj*@$i@(6 P@(C @ @4[`Y/ObV\s}zN˰y,:Xkg.\D:DmLc5k{ w>Y`#("^k N-gqquAJA+m LEO\I$Tj?wL^JRR/N tTZX_+M%׺DO2O 5S? Hbw*fA|*"ĿO@\/Q墓L)m[N3V:4&,]E5vW!Cup3:J J-Ҕۨ*mK!8V%RS?9m|bGb:}>p.Q(oJVn1gD"uf٩*jZ@9s &t%={-6dZVz!j}Cs?O-ksgR]k}9g2|>-G6}ƽ731-9KJٽ{́Ui2zjV& Zlςi||#zK#Kti[ȁjSqC:%RiӠGQEz/U=Tc7an5O)j=][֏_+Z:&M5)xeLpTE^$"R,cW{' ?'>@漣t )R4H k"Gkx6#U'Sg ·\MOUԣ =uLֹ>7v_)|:q*wzѥ?3^s)媓Ѧ@-~LyE6SG=J\|Iz]rC( IΌӍtUM2BWG ^Kg˧ՙU{y VBTxRD5+vֽE3ԩճ3߷?~Yte/Yҥ4tKLUzi3sZr3:=jfF ̘F+P~,&֖*\lM:㩢q3JRr R>_&n6&**RzO^k@5j̙]/I]qnKԱJR+cDCgBZvggI;_SZiGRPҪzkN-@=W(@DhAsPŠ@Pd?&! ?qh5Mζ5n@p!&J`|DHN=^>IJL9]*o\L+:QTBϱZZ2C_J-y1Dj B£Nni 4EB6*vgQR+,=Jq!QU/;'&.+KηmY|$~^S+=fڇ-cjG 濘µUS[E׹R9cIAl6536ϸn؁hM-݊k[v ۦsVf|w}k_kZͅ^^ tUR5v ׮f;~;rOcZjԵ5<ϒuzJ̰zT7%zU7eUSnU k59~_?ѪOMKN~|E4nZoR*-eˣt$`cG"yÎvq|]A' (O3b֬*_;`th$4J-uy&i01֩_Oɥ>5fs"Ew1SEy堃gZ\⫒TY,"ĭRݙOO&1%ÿ^.ߣkͣ\qR9].}J]?N|~v9%apVwz31:\zuSNb/|wm[ƥXl OԩZ&KKKeκQRӡ*r]4JSIctQӺjOD}Ne*ܗꈊԖ5Rs.]>'iK=MʲJ`8ffh$5lj8Z2d/AP!E[gC5[SZTs0G }I[sOAR]ܴKYȶ:S76J.1fħ>k5Kɻ$37.}1A8oؿj O 8s@!A $ @ă`d. b  o}Eϸ@ǂ.eg4"˚C9,%["mC}64&2MH9ٙqfv!y iM |OE\KVm 9"E{%G.3qv3;D\RZW!Bscu'S8T;c"^[u̹>̵S_l JVzg[\3qd*ZCJR|'JӼNgUM7>|| 9Sb5t;k7z=Ku/pT[3*x5*p׶yE liſ;2Hn:jj i¶/=3?!e3ANWLR觗y#Tf S}nzWG65p&]Mmrξ׺W~d?NOL.~|U->Of<Ϊky5?%R.g_ٝ1Ʀ:O`%e6r .gq)Lš7."e.Wg;Jt蓪Fm~Y3/}slM>O\vgvl`MkE)FrR'm3;GbAӯ\'uTzRM*] m{g_Kv--=X7b>ZJK[GM)YZ9qiʝamo5ts:IX_cJ=d+u못ZUDi]qda lSS{uk|4M(M_֑T._Χ]!kḏ8Rɯes7U6S~KO!T=ƽX϶gĮﱝ>zb_7錆)[l=Ţ`';xFsY1KM}zfykdRr\*_)|OߤՑNTkrF7Drt*F/ӵ6BEk7q Tk i%j̇؎9Q#^D,Ln7=)d:bgꅧؚ\sn#?ҩ,U fk_s*e6K{f3'|9 At^Ðߨp=|TŲٜɎZѤْ{LY:yMw3i,6sJ{Cyg[l>< 5g"z mM.>PCVv"ϑj$9($ PG0@@$ @`;KFn=Lj:/[x`9's@FU5q8U@DZ{8{߃5"RJ_ȖRs SAįgmn.So!7z?8SV댨W먯3saBj>~z_䆢sm`E+N3 J7!8fg0*ruf{zL\>$z92iRa U]k^2ݼCsO[`(>ZhP)UfTA5,aKQ7)Vm%-+OUp+n鴁ItBzB>@\3Uj )ցM[Ŭ5R%3no]\j׿:_2骗1?9˂xYȘEtom_ n'禷KpҝC=]I^Mr3QR iPvQ^Q~S;(r\7$ž;sb~} 8ѫ]sԥ)cYG#o u(JsjK|)zO2׫ĝg(<3qTP^yRzUݽr>̥ٸ̹N.ˑ Noie*G7$rnWNy% `ʯFZN;2MKөpcS9mZ{G񴥜Wt*vߖs6Mi UU֥(\U'UTFK4jbWAվkգ:}T])? Fu]/<̹5ze(z0ZE9O⦪Z~yf7# 1mt皚U;H2t41KS3|aM+3̪t=ṵ*obhMu&R+g'nY(L(q Z(x;艌ѓl'5ZTN8f2j;V C3luG-f V=cY @i6@1@ M2i鴕ӲԚ3]ui uCc  U"5Piፈ߸[5 ^֖4؀VAߔs%Tk2)qZg\3:\[fg`Ӻ3@YCsBV喝1~'8DY-t4PV`u;赟 OEglU.J7TS7~#MzҷPJw&d>j_7|UO^qRf;3܈kOi-lqڕ.ϗuYz: NpԽ{mA3d TLD_~ePk*J!SkJ3KNd:m-T xΆ*}䨼zl*vϸ$nDTKWЊ9-“s ^{NkCTkr9 ÅkkGkUDGNf%lɥ7ůK:*(b%q 3zGtbsuVk\oXQ)1ƪ_厛v<% ]%(Z{A+$F_r~qXu} Vt(SR:g!*#f)S_?%U1ҋ+i^gp7_^]ghEiNn _3tК=ESXs64UirxSQ zi/Qg7A/Or*4Z];uO~3~B(D\ڏQUw['}{2 jSG]5'N:k?(W2ٟ>+No$Co3Kjюc]Q/sViv%zn rjK5򀦪tjK=w^z^wnڋjO]DNCTK`[ِ߂Wa`MTCܿɠJZZ Jm VJ^?].43h3VL3IRn~5c:kJe#,n }BLt56QSɕߟ@.T4U"F&uUeSÂZp;3V}8䣐?NϷ/=`i)ỢSDp}g+ԳbIlfx9:-ؕfYON;b5u '~o?@NGf{ д\-/דv܊d^5a6*'+AZse.\^$ P.(@H((P(0ϜOW~w]طh&. iLg~a%{%5TsnHxY:U}yj>)S:v"wY7k󶢘ziPu&IkxAS/Q n3*UR)Q+ڇC㦭bkgQR'<˖~Wyfl\Mw?DUD̨fLskSVs}x.V?/oZsۡEgt4Q١jNm3Q[W~nJF÷SZZi7m" f[JW*]ֱ,,ϑ~PztoSg Kx/FN9_;E˝3 &\IϙztqSϾuzR?޽ >y&u9jZ[GhO=*ΪZ/tۙt-1ejVAS{:䕜։t&gNug>/3~kmseWiƎ. tUC8lTk+;t9W =er~D/Nz~zٸ s[-z˜{75 VBar /N^ 45u zbtkDejWت}HD5υkH&k9 \6Mqr'n7a*2]Цay< Kv+vU*<𺇈>J!qpY[AV\{5%ԌfCOM֪RWXG\_O|ς~VBgJQΦF=C|:C-Izu&f%5:\9V%C߲]+3Z϶I>җdC]ɭUkEUKQtM\xA35N܉>M3M< Q*^a'3 |rd5ܗEߑ8d4Ϧ i[P;hLR! 92@ll!]l6kЂG.4[|5n^!i}CZl&;=6+3ԙ0"VニvY>FW 6<SnVol a3ߐ u`:yMu3>-j!ҿ>vM:ϑEI9Ntnx?%6`FSݡ?&훕M}E+GOPĚnvLS63UpgܗL!j#'DL*R->pU:6/bbkb-i<5 n5릢jvI˰. 6_:{uDQ*LtqDk?iv{2JNfwwW5ŭ冪|f~Uz19gTU .ŋ^WcGӵ\]>O3R_9Z T`/313>VoML*8"?RJ$֊RPnPS34,M K|Ho999n3t++\MzƖhcU);uDYpF4Պ^,#IMvOD5Ir;Cb&W"n?^+VRmKvvS:wD";s|E'5 Mt%E4hgt%ЙrW֚vh!Иo>owصW/[|kU]s7#S5 ^=5?^gp5Zn(HQ&ĶEUJ39Ԭ3jꕝMWL+˵ʡIjinKÛ 4DhZ8Zymt -p|Z1f󘊎IL ZححbZqב. |55`Lx H(`i*^f ol- +M;@H o P=k][fCVm)++|fw)FAuk{_J4Gpߧ譙#mN"3zs'X?C;yk| 'Att+BOT+Ut-U+.TRfaYKsӅxӟN4̂E: HIYgB驻.pNsLO>n*j].7m}~*ī RqÝLߦLuX7Ʈ-5!"Ҍܨ -s3Qv$>kIR_|~\-`腦-_Sk>:z kԽ50CULZO,4V7q%$!MPEJƯK^dkS5{J[OU&'uzv֯#w55/݂gU 6gTݚ({7lzmsH0XϣHpKg芽=lm+q/ȍf0tD^U5իG37Wřܤ3jggIm $3[F3(fPz|6$]#~ܨ^P˰{.hoM簸vB́\!5@l A߾{j7i.zH ]zx Z$>_ CN >AGH!X|LD:x 똳P፴.t&;|wٟI\6fCzߨ.q~BTDf3RVt i=sSRgso|[s9U^4iS`ƫ䌉iXnK-2iem Dv'Y1R&EcT^K.iSZ]=mVfX/M\/3<1{[yY'=+N}7!d(̸7܁N|\g |K9^ |3$҅h:{.[f}t%i~_`\Zbs4)4Ӎ" GO NUĉ:MKo<xuOլBQqq?K)t.c5J %a{HAЕv!mJZ֜tHaQ4FuQ&3sֵz:)|w1MC4M֚m"i?Þ2*%AO\d8W%hͥ.k5-슦ҝ:陖!k^t=fuُAVg0G"J< U+'ph|Fr3wot`ׅOapmN ~NL4UmSNtz*UPĪB zq&fj-WH)5P( "!5K ӝzI>?I- ] X/_NLs*޳KYߝn}zlV` Ȫr2Ԓ|[wmS̈^nm^,A/-så/S]4gWh^.}ftziMs9 N d8$zjM}XxчWim uSwF :V3O&3wDrؑgMjJ<ӵ5^)/$;}M3$8g%n\i^-m[h=w)Փ;\"P8)&w /H.vY"4ZtˋMcvoΥBiN֕%4 7 Khr ? aHU]Yj.AT$\?0qKf@A!)wo IȤZ{43BO{O_ȸWL̹ΡBk]zϐtΤJz)9m}׶g$i>~ I'o\ݟ:V}B5pԞU6m irlD:|{Z$Q=7Ijr]{ M_\nJ)8r0)s}`Iph{~] ՋLjL4 &f!Ft5eMMrhhA5ߪ3~kj+]2GKq^ke]/bfE d[ ê%RƴA؟Ck7 4Fpnki/R.d7N фi^Fa-v)r.apv* ._h4 wC]\"W`ˍ:AGJjTkj&YhyFZCObA~7뙒QZmhj|>3+V1M5[.3Aֺ. *.F_M:i\ұk`؈ko[&Fn{$iObƪ|Ei{Fg{*)t'^5 YwO SngG B44Uƺ'Lfg]hfkyFfr4;^Nz }*.[hCz-`MDr;ۘ='i\4t؈o\\d)U%sUř5Fv9#I&2kykHHGBn`k0EP@+0Ei@OSai~n|.<$QeF H+h5=O/Z'MZs'$eFOG dQLiq~bU5lؽ~3<\',TܥZA:wmz(#3MI_H|1y&sΙ-"ȑ\LUSMfȤ%p]vȩN+h3Rϸ-g2?mxg--)>ZN!yDL sT{Mw!2LN-{3ǂ)l U( -+sut?%d/~9% -E-yZtBIcU\\qy Zxrxzg/Mit̛_b$n64֟H2!r2g؇57v*sRv*SCG+B]37$[t>spىV"o ש} \iUg)* T˦T)u"nӹӵl/L GCV!ŭg)ZW.Ԍ IQ=5W0F+A*}o"&,|` վҚW1~ g7XS=?JkEc~w.4C5 u2i7zG5%PU4%Hr7?K&>xsY7bt-4(;ܭW3O|Rzf*:`M?9!|{~ l)Omz+ZLa'k|yf{ &.O9 ɊfA!зjl`,:jmm*qm;g?UIus`R@I4KIuJ+CzI}9n9-u_mk_OU>ɺ!3[=B )):i,Ta -|Jz.␹Y?N$͸}QUR];7M(9et{i45ILy"Wg)T& EZ=Kş뿹W3@tfv.lvo-c֞3KFx\GUFjU5b8WGI?&;I̸P4%_LtT':f^mے iPocG2Odc~ub"V&eC<͎XkS\v3~Oaϫ.JuF\ fgx\ʞ~8B1ԍBqZnG:; "g$RiDPz9`HDoo7Dv7d\*9M|<ȖoZI|[ H;s~Bۘ@KA$†K" jN?@xH$P"k <`N4$=)e럜7y:/mB+Mv_ANOC6?@>0ffeơ*:;Ol/k[:iP\3c=V`M>B5 U|q!Ͼf"lhgMΜ?Hi4#?C^)saG".YgPNss20婅!ثִ f[ ;scf_PBFTߑ. 2K"s1'EYMIsr]4eu;8ϹͨBҕ.RG24 hJy>NwETջFfkt#Tg̥O?%ζ~ %{3:OӅb>IIny)n3G5sVU&a'd]D7G3JЭ7 kM\44ЈNnC9(Ց>Nߡ%V隭SK8^ِU&nT^3>24] NeBpz>s51^#Eni$='L-B3Np~KHt)Yp.9xl7O&j1Ȋ&ki[ffo>_J*q9o]wq8m )7w`Ԥ$3B'MLDsZ_A~z6KBuk5[VWgITFnjת5W۰k@q[z}HlҟQi@`E /ܙ`FuGmٓsɗDlt.gie%Kv6?BLW,*gB]wːzC-3+Kc u&Zrr<שe~? eO4U&0R!N+E_Cu@}kJ-W'ٔ;3t\ʹp4[d}GH2o$^1- gɹ`^.n+]fR|ˏM>s/l̂U~BXM?7PV{d]VD㐍f:jLHMkj9̩z*EčH Y}CZ-ip[mn,N b" OADũU@Q@34RpkM-=z8y ! ARBP" @e@`X3=j%'_۾3 )U}7}?? n4tϜfZV?VIUM ws5 ^9m*Ԫ;Ug -s:h5ب3:obp+;q=u r3A}sRZKQ6,O/SEL/|52I: z#FM%Z5i&QĪk? }ƚ~Bw7L3`Wbfl9?|C|V(˂Ѷ~ ;|$k>SSES_+ [xZW9\v罕&j:zR#'`^k 1f{|o!N j,b%* !5Vf|V\䋆W'ɜTE$%TKoE3B"S̞sR+sD]2Ѽ`0ᛸ抩`kORƯI13s}Zd4xt[e?}UVX$ +@6:Rv1-(3tFTgܱ-> _C7CEzo 0Jgjw{۶x'|B2\>9&w癛 kk)?Vo3bB䆩\z,ftY=It#haR%Ӎ5qiNj*Ek2BUi[II $ig!a. ]P8`*I."خ D͆) BpEpL 6'x$APC@=HP@{A \48(OQm6]$3י4h^Ⱥ\͉h5FrJck@EҶw{ffDpi7%R짦oVCIYA"ֲMjS9J%I}r8T'UBVϙM/G3]=P]I%j:TPW9?03>AhP6!WIhNgR*n#Yխf~Gy x^#]-?Vs4k|pU[Ln[Taۡ#29c%ЙȞ, nFv2j⺲ZkOHUOYR?bt"xjJIkKϒتkߖlǘUr3vRz>[?tν [Mgu&-K蝍c?.k}bMb&DL@R+! ,\tY OeNliC)pJ\ ajQ.̫MYtMvtQ^QU4@㫋rfS *nr$M2T-w)SJf BKϏ |&o3~M7͎eKZVld1qcNw4V*,o/QtiMS 7oH6]/@ _+ĺ}࢔GFߓ6s' T W/|ʦ$p"ڵV?c4i5%[Tl?@CءŨ A*BG$rH`$2  H&89Lb&H@n pCHŌJR]dNS{djI5 r\ENz։.zI-@  @8|=J) L|Oj?ђW@\*oi@{[_?P{>pDG;|u"4}\nKC݉h7^3%SzS$~fAw\ƵNbOh6*w?a5ۣ7pL'3$Ms\ЗԑsuS• rApM_p-l8]<$M? jWܵQ\G .ni\JЛ~GNSMRSUpZ;3്ov3L@>`b& jkө^}Hg(mMiMn%So#zqmjeҠTA IĀ$UGL^l5t1C }~UZs$؝/=~Gk3[=sOɂjY(ǟk m{bs~}s4ח KkF|S -ns9ԭ+QT+Y.uy* :£&/$TFfu5Ƣᇩ;&kiմ2TW0%~Oj-]G*`!e~ M"-IJژɑP! @0@)HHCHT@2@!`Xa"@` .jC60$ $Hp"MKq WB1DOI;( j\s.Zmx2UDdWR4'݄ٕ"Eň" z0ޝ?]:tKxЋxoAMxj׾ft['ZUy8}:^§,B }vx]2s|ny̛~~ iF5H3:jϰ:k[q΄WtH$Z6OnyIj.3@X9To= രBt:}nf Ypfn%)nhHZ[{5TAѯ9">{NKN|7ȓS$VM9]ƜqC>As3s&[fCi:tAwuEt󝎒>}~ IVNε8-4rT^}t~] T3 MTحgN~,WgOz$UAG{r5Dc~wB0JLP?[k=`fuS3bLI_/b- 3[(' JѿRlJXakD+W/9KL)$6cU٨D:vM.l>9}ZsfI"\]tPlU H@W @19HPC(C@ @0tic @ يE Lwj1BPH` "R20`HR E0Jq`fv3H W@K3>HOADX%p@}0O$[HR+n:K].ڃN-amas4k/Շ۠A ^ âKy%E.ZEbEt[ٞG6"6nJJu 3U()vyaR+mB=FHs;mOS>#d64ffk:Jfl>sDžA'j'IqD]*gM$ޕ3 5~G̩e\;":qDy^~ <=Φ?AM]X/3 kxKQٟM5;[35?nЕ1?Ejb9+J&J{U5{ִ_VXN&@2Aq5|\4UBzUf䊹F~O籢F *?~Sҏ<Loƻx) |/ _0_0cMg]ΰ]DGF-껀D.C x_k/$s!VLKaM~z@J[$R-ouBϒ\MT̨\ kIC5=b@ 훋op@!mεv5q4@l `ε`kP aJSVE%V' \-Tj_?:{ Pu Zl)=Y;ҹ ֞ hI7ؤ&0$Ur.#e kƕVP: _o'_雲X|]97sI̬2m9-BQTR4r!c5x~O~/\-d.uytZ# 6`Ѕ`nQ;r>Y- pZS홷PNG  IHDR,WBMPLTEUZEYþŽǾƾƿǿŻʽȽɽȾɽ˽ʾȽʾʿʽɻκͼ̻ϼͿ̼νξξͯҮӮձұҲҲѴѷѵѲӱӴҷҵӱԵԹѺкѸлѺһҹѼмѽнҼ¿Ͽή֯ׯٯڵӱյԱֵմӹӾҾҺԾԺԾչӲֵնֺչվչ־ֽӰررٵٶֳ׺ֽֽ׶۵ڶܴ۹ٽٺڽںܽܿؿ<tRNSO4bKGDH IDATxOZng#1vn:hPӻ+EЦiݨ8ޜ9xsR`EK,Q^st[%{fϙ% '|e DYQN% ]e-٬/>|>(+Fl2&R^l#Q3K.!l8##!µg(I: vKb!{`/gPfA8+ y7rNk~&Ceuqw^WNN>[.1*x6, ' G xYf>+1 8VWy} 潺pXcSoaox,F`Bֵr/Qys.ZB1 ˀwЃ L/.+խ-ߋfyџ]](ёix (1\33ˤ . ]YHCP֊B}f3 ϙL+nW،F4.{rjok++PEݾs[7>, hAYԉ@`I΍ X"pHNW64vXQ/+Jt*SWxւɘKkُ?^z.0MMcT-idZ(^?>>%<{_˸$1jh+/Apo7nh)њHY3lR$ `y2Y`N\`taa‚"F.(ԵK`CG^# :yKV )!-Tk$DvA~AHooL ]_FnߞgI] P%RYRWe0Ě 0u9wS mĞ 8-SO*y֨WKR6)pthŏ 4###V ̮urZn B̖@JZ[]Z\%488d'R24EW:|IvΥ\,8:9/bvN:VMbӨR>%BFGv ULj ի}=CĪޑqrֳЇKKfRKkHN0r"ć\s1@Oo,p/"a2$:9K % D*Wȩz^|xXW;* }0uN70#Z\$^tp"2.a"emx>y}`xkvvY5u-Ϳ1zS[Fb8#$SJr zyZ XjX34 HRQCZe bd NƩ ,|j87~Ukhת k}}Vlಹ7i3QEGVܾbH2 JJ z1'UpY3bذq!M% .wᰆa _ffhxXr]=Q)t~qg||Ž3I3{uwkqыb`d'0xyŊQ[WVLX~з WVVJK ~,{VC cRUٻJ!bC)U|p:T#DJկkrpZLsK7Az$eQ[n!;0z .J.dsmP Oѓ|;9bu^.I !SGV3qb3+c(9hj e,*XK_.hP(lif*zP3ђ+7N ۢnNnݾ7f߇e|cVWSl~Bd&zД hצl; <"cX\S)BsXĀC!A,֝i%= \ఌO  .ޮ` 5*RDGIXڑ[W(*}~;ZF,"ŧObjz覟z3Bavohu|O̗? *;g`aXİ5hB#@X{t `)5ZmO_5DAэDߥTu=݈ŀNaԁM ~ΨkjBKszVta>da(fs3^rwcb;# Ƭ^ܺ#&*B*Z^:Ȕ*ZE:=X:|>Ӱ4H~q4,rHOGh:B"VJZymmHus)r9QO~},=|ZtgyrylԊ6q6Kxy^!W,F {<liNA4;(ϓv$ ~ieeaE7ml_DhY s~X.X / uZIz=PX{IXp~g?X[񯽪@R eX*526LAGSٯQRB;Ί1X21^8K߂{_rJ| 7YM p](P/^n .}tν=|+Ӂ _}ۇ7Ʈ0^޻9v'>xV_޻nNFhRhѲX CX  q9`(FrQ^h111lH_РT*Mwzo?q *@{Eu ֭kW a|Уw?|0;~5>ï*(;. b?_>)pgPܽy>>>?S2d5 -յHgaFa9s"X㒅G] d[mnN"ژh!z[Az5zZ Rk|S}}d>f]ׁU;\Cbu+ݼu.\DP{:2 q>reo#n*ֽǰ9? gw~zuw1~wct8x ޮ۹)u=vvvE ܏ }2ѳfd^I82UTWs_ asΝM]¼:D:HH . PՇĈu2lk݆~E1茱C/ /|η\p͏>v˯H՟π hXn8;TtZXSSre]POWya)$*mmX\CC@?)V*"tؗ{ػijxCv-ttIuH8~ȉb.3ֿkƮ\v6-o}v7>~$$~{GQ1~ۯ+3חw?ˑ3 ֍7FϾYQtZf:DZ#:ફۓ22ҫsE33|EHHEDׅk(=~y("o?'wD?_K'O~ ʝo, J~?&7~2܏דըccCEX[CD4BCrlE$ uZȩ$i k1T{Z4ok$wܫn{ Ü0p", ߹ ܑsWu)D!ChUiXobl?ZUe5s(%GG[y &,g/Q6 ;;"D!]Rbb\\Z1aK::ErŶFuGn]ݢ|Bښ`1-$<( .^PKOL%_~Eԛ>x,O`]'Qbin "bDZSe1%Xs]zrXWe8: ,,a> DZFΝ?FnW!\ɥWa`rJ yq9΍$Z'''ؤ=Dln6ƽ-ȼb TV~g7$Թ| ^[H/`M~݈݋,>y`pgwၞ⊊ʪ*sXVa?5קEnUU)`e"ϢXHs\DGWXsj]fFE){5m:P%VP؎pښaŘ51xҥO>@lW;呓2;Lx~"///RڶtyKD֦W|6,f9;d!aaYXvV*;p.dKpa[[m9m|xWu`+w\]f.⛯9߿};o~7%H<ȄCb \ƛtn|Nx/s^,VZٳ079pF/յ&V*U],k(Z-`СCŮ MMf\622\Ȗ/cp; Y_?gq\Xg++ssri^JF XSe{a`e&X'a]=y{s wP}*9&@"nrW*TE2WOO!bbJcꪝ@k&"p ߓé'n*w@{I4QY_kv7C-qk7߬VYVVaI7b1~ŭ_ʭ_:qڞJI2`feY?_:8߶?#X%%}%yk"XtiP\qFyȥll@okkc3Փ"@]Jjy^MZe8 K2 t_466(P/~ 4k.]dWG8-z,`7ya)2;5X'`Mxò2p0FnOjPIVcxޤH/ly uY+jC3l윁+)}Ν.WI V^ fk/|5}>H:h.? W'8>tQ8l /'''r[%XQQ%wչ~2ܺJ޽s׿1Qs&X7n{  z>3?!!a am}X֓2<Xsk2cehXe|sXXM iY;}9p~M+iM*} \2BܢCeƊ}\j'QVHeƤMEZ]foդLu˨(/\|/L~gxqc1ڮߺ};7?uelxpA,qpK)((&ɫҲ-00uctWש(F)UddX`!Fe\C rx4;worrvew?:]_RE`RυHmjjC X]]&j05ztr.ӱKxa?9aFV=Zm67z ,2XfºaSώ&eIۢ,blf B;݋8E&*ZYVkfP^Vdp&S0po KM=Aw#֍G!Gӡ rtKvvF~(3 k*Jo59an=,#ejab Jc_\\T)K.G.0E,;iNdeU5SBR51իv5)n3'O4z֥Kco޺>h충|mSԏN#lefffeW~! Vl՟σu:u 5bIIQQQ.dnVzWx KX\(<< fO{i6e(Kif20(b릦I6qoȈMw8ri1`߾k8K帇uti}vYȞl)'+[E%kK`]g BDВ`iҒ<#PT+ '/Ң,lv!.ձUJȔJzqU.,6uS kuTxwwgw>5]FXHG.]:yɱ.|aFXgV)/EᜑHڒu+c6Z9`\N9?O9c,t4=%²Dgg OL":4Hmy66pXwwudnk%/26E7-G:zU3X7N!i;;HXR!ҲEZ۶>?, ,uuu=wOf:elh0M\JKrpvp𔻉vԼ 鄶p@?W+j(ejKVjjv K/Y,]a2:yd%[o;Ο73t /JO! T ,ĒǙ3WQU)שbk[ZZ $Z)s흽W(P'.甘`y8 FB6iz`2ڽF¨7&aVI{0,m*pV#W2=QOZ-ޑUY)i+,꼘bZ8qTU6TT}"#E30M+%yCDd8=Jlu, `ۻLLhjҪ+1G2R†V]pӶ.cr%: OD7/W'9Kd8=02b5moo`*hgge23YV9'GGK^x`m*ٯ_TTYTT\b=`5<כWEDإq,I7kJ%LeU;($XQ&5a$mT'9 v9 ;6=x'ֱ֨!l@+-*H=*T֤&$ɧ>XVY=+ۋQ[28WU=&JJMIIrq+G`|2ZNӧCt6iW;,Y\MvXLYW sp``phw2cC9YvG%#pۛ$\Bҗz)E;Ʃ3@?-H )I^s:x˨z\\ ZVE+kaAz1jGyCN-XGO&+2VG0~#oZQȀt V( zXOڢg`]g$Z!mFӞDžJO 1+-%%2y\GR-`C;IƅX4[7bm\0VCxg zZƶa)}:xeh't{zKgdS{vƶL)9Œ 3^/+5v E 4րV-)9eSJ MyEOjٴ)%9=-EʕAߓ%6᧱rp`k"U7ڱc*- _`D&Ex{U-aH6~=ЅE! Q@AV$XJFRӶȆ X]֪C'Jy[yDk5vqkwox78x!Goƅ \h^x[el/oݺbYDXgϖWev* V+70b,-Z, JM]hg@ޠl'r`h5f\#h(FWfJLP75rnQ%D)Ս5$!SֵQ݊wCBRg" Furw`"/۩:;{Ȫw&1TQ;rζJZ`PieIetY~8EXTYgE*1H ƕ\h]zX̄^aCecggog'ⰵ;{ww3X3g\*<*paYjuz\58ܨhٗuV7as "TT \Lrrblb(ŴT.Rj@%{kN"j#WkKgWPm֮##\4\"zu :U0Eֶ,l[$GeeeXO`2c"K)Բ)"7?2ҒӲ2226$z%mn+1uedtGgDz3X63l\ĴUTJZ末Kk?liAZ% VQ W G- ĥeݝbmP_Gq^&U+Rwo2 DZ2:UmoJ]+M- XdlLHؐڐwL6b>rM"M$j4XoTl閺^D@鷭Zt0nf!_zaY#b%^t`a D:zY7+/43cK>ҋȕF^XJ̊U%* 7+%yL.Hظqc† I^`OJuR"# m hl]/N6 tSTpH`I5r!` \5qE+[(8؊ƺ'p@+UW=CGJZ\^J'YZB'm7,,V:۫JJT%VȂ^VPӂ %#!!a] waV0/geٹ@sQLw8E.JXWIU-)5bUu# tj5UDcRJX{}bmYqCEEՕJrm}rT9m޶ CnLHʸ>XYhU@߾IЕ4,|KμhCXrn,<%X3ȋݩii.1u8TSOX+n^z5jW+hi=ܦ5ӫ~ġ>Q&t2l@\ƭRia' %l IEaA)a$ܜ1 c}\1="Âo?B!-G"KQ^ؒLŠ5繨ӣL3Q76PG44h B@:IjcТD3xvc dfoGM;,-ªD.,]m)ܘEFI7o6Zfڸ "<21.#K&B WJ-R1c\.μr);kB"j!%b:lmI11 r~^(;Q}QPUrrEJm|<$XOTV UM6ep-` i(r ֮YXkF\D+P9yg",G =_B `E X.sOGQ:DNdVTrםZԍMձሴz:NƬcgpB* sr*!K332E\rIw͙*BYnBQlBCZ7$z,#OAA/- [ q%DF\6rnwU!V%^ݲhZX/"-"W7J!S ⓰.#,W tvV*:\D,=KjTT:YSD (--ݤiٴENQm! @k̀VVXrEGXbвAA@yG[ٶLӥ5~ {tLL -^gF7vtp(`Q!#v+~˩Tvbwg/#N-.asU#Έ@Mۤ /6ˈaf&6ȕ\ǯ!5+(epF,0 `FֈVF".=,w:ʨz_1(8]meOEb -]OȡN];p QB&F=7 nɰ"'5>O Jc+gXe V>n%p%%.)߅2"0ȂCh3Jfq,^\L+-mOMi;{1Z@O_zW՛m(2[sŢh#KVOCi1\̌=z]%ziղk^}ՅKBZD.@-m\uLG¢q5?w.XyZ'uE,}+W?@Yh:;&VS\'j;~w'lp-y^8''LLy][\2h.%fd[+~[8ځVv~z+A/`P7,[rf޴%vOX\3E3wpPmAj!{}M#*mRx|Oc&G5BusرKJd_h<g]~r漫KXcOrS[浺yzPR\d~mOĪ +++ V U}&(+ژ eA*脄?lVt⼸Q0hVpHhb 5:.",;."&6h,?]s]b@KUܨѰѨj,*)k&@ VT\\QR-, {W#B|uJǏ²-[2$W9 )^x [IDAT9,#a-+"h,[$ `1YX9~ lի9]sge3g:(OMtoV sP 7͠с^8 XE X%OI(ڿ ㇘"2àpOnO5Q)_ ZlB1Rsx5^BQkZ:YH"\eK+ɊNż\a{U^^Tܚ#9!qMճ?XXSb=ǽd[qz&L7_ 56[ d/ a2CckJOsǏ \5 VZ5]Laĸa5cxzDv1 .Fybg<#rgHn,Bd'ۃH\).8O[L$R6@VqDC  ZG`1|/YQQ>*b\֖v^zڋeϘEXVmSfoz1yyE~!/4:Pnjr_4-zHѩݲeѮ8z<ü+յAl! (".Z"EWee-N}+瀖͆jQSY]ڧi78kW7$#ɱCxaaF;eVS[}>|v^{׉p-Y]F?D T, ]:\-zib%h]4.\^^1;wD+gPG̰qmJZ۬_֩FŅb= ̈́A+ц*+f$CzZ窼jrVShd,ĐJ qqk֘z' 0,|y҅/oϟҒyBD"&E\QRk*%Xs91%FˋR6$&LR%geWA>׹ ODV5h˥ l WvI}^x6)yf/TffBW0p, }̓Ip{DQ|Ҋ^Baϙ̲UrcU1f 2E„E+WvXݞ=*IמTT1UXE Z`EMfG(AHh'!-, !L.x~77^,ЋHaL^reʺu7<{Zҳ3Lip&G\8qՒӞ2ak + />.1221QJ1*_R TQ (@v@X8:kyWW~+",uu7#zr7elfiq "~إeDkDEjT7뉕 rt=!𔸵RߏKO J `Q"-/"1x?1+,ggV-/9"kP<_%å22NHI\.z^Xz\`.jøĤe~j y($XAX$PZDS \{_vrO'b#V::f R ƍYi{7e Xْ]fQF0 B|:)ZV?XƦȤW>($m ?$C%X (CyB)!/VDWlx8 EXв5T oHKśYiM-tF%pY]c- Z Zfj[$8DtJ`!}}BBd!Ȋ-~ɗG ;44t7"pt숰D*; 7f$ҳD-#2GTl9а&A5e?ewk2Rϣ~,K\GЁHtɂaP?_Ī%a}Sb%2GG;ggW? #22i%.ն?@t"hmP>C(2GcX-e> KCeb=TYH""P|8/`)ys~R VC\lfaJȏ,)HkEs\ _PډkrU.^ʹ $ZX{ܒm<+aqYIC҅\/P @Y0D#p' zZR-'9ȃQB/8zV 5R \֏ꯅee3Hw2lBx|Mc4V ` aL.w[.`%2,)9)DSSA4sݳ@PT? ,3\Vah4"n-+ no\x1A(8+-}c g$SA`P' ׂZnm\ ZCT x䲹٤weõ>N/ )]w>/䞰_ߤ @KHJzukNN#.UZiděqX2"f-3ZDF0!! X/o"8#Q/2|BB<=Xh-[.!>~ԤfڀX VOx~TXԏFTXO`obDTg* DdCG rڜ4N? '?>'y~P- |TN)$&l \Ek-N[l ԓxڧ lM$ ZGX`w+iZK}A k%n~a1I=`=4BEXAX‚ڡAh(<0eH?:'?!,3 +O^~| {+}o'~/I/250KM|J_owF_1{0./gFAIENDB` (`p( / 00DTimes New Roman̳0~0DArialNew Roman̳0~0" DWingdingsRoman̳0~00DFrutiger 55 Roman̳0~0" hh88 @n?" dd@  @@`` ov$ %               ?R$:D`MC__0$b$pZS홷QS ~1?PY!@8> g4FdFd~0l ppp<4BdBd\%g4%d%d~0> p p? 5O =GcE-LIMM E-Learning for Microelectronics Manufacturing IST-project (IST 2001-34828) founded by the EC d5/c   h fd-E-Learning for Microelectronics Manufacturing$.--   gi j k l mn/8e  ` ̙33` 3` 3333f` 999MMM` f` f3` 3R?" d>8!?" dnP8!e -dh% ~(l - ou n?" dd   @@``PLg h l o u`p@u@u  #q(  p # C HA0I:\e_limm\pic\bgpic.jpg`    `v1 ?{]U  a-Klicken Sie, um das Titelformat zu bearbeiten. .XB @ 01?w'$w  Ztx$֏$֏1?v FhG IISB February 20030n  }c l   `}''1?X" \  **TTXB @ 01?'$R  ZTz1 ?)   dKlicken Sie, um die Formate des Vorlagentextes zu bearbeiten Zweite Ebene Dritte Ebene Vierte Ebene =    e   C ZABI:\e_limm\e-limm_logo300x166.gifTa ^H  0@޽h? ? a( &folien_quer_fhg.pot{  +#` (   p  C HA0I:\e_limm\pic\bgpic.jpg`  T{ ?]  a-Klicken Sie, um das Titelformat zu bearbeiten. .rB  @ <0*?]"  T4v ?]   f2Klicken Sie, um das Untertitelformat zu bearbeiten3 3  C ZABI:\e_limm\e-limm_logo300x166.gif  H  0@޽h? ? a(D 0 @(    TxMM ?4   {*    wwee  T|MM ? p4  }*    wwee  ZtrMM ?"   {*    wwee  ZrMM ? p"  }*    wweeX  TsvJvJ ? T\  pKlicken Sie, um die Formate des Vorlagentextes zu bearbeiten Zweite Ebene Dritte Ebene Vierte Ebene Fnfte Ebene=     qp  01 ?pI+  H  0:lZ? ? a(\ ,$0(    T4|MM ?4   {*    wwee  TsMM ? p4  }*    wwee  ZtuMM ?"   {*    wwee  ZuMM ? p"  }*    wweeH  0:lZ? ? a( 5 4,P(     `t{ ? ]  dB @ <+*? ] dB @ <+*?/]/H  0@޽h ? a() pl](  l6 l TT}1?X JProject founded by the European Community (Contract number IST-2001-34828)K 2K K {hh88 l T51?  mProject 2  hh88 l ZT51?  jGoal 2  hh88 l Z451?` X  3The application of information technology and especially multimedia learning content included in networked systems for training and further education for the staff in microelectronics manufacturing  hh88 l  `451 ? 8(U -E-Learning for Microelectronics Manufacturing$.--    l Tԇ51?X  June 2002 - May 2005 (36 Months)! 2! ! {hh88H l 0@޽h ? a(- dm( 6 p d d TT51? ( To address the shortage of highly skilled staff in the industry for microelectronics manufacturing by development of skills. It covers the set-up and demonstration of new schemes, modules and courses for education, learning and training for industrial staff from freshmen to mid-career staff to be retrained. The target groups are operators, technicians, engineers and managers. Web-based learning and training platforms will be applied. Focus is on industry-driven actions adjusted to the requirements of the daily work in a factory.  2  {hh88 d  `51? vGeneral Objectives  hh88 d  `ԍ51 ? 8(U -E-Learning for Microelectronics Manufacturing$.--  H d 0@޽h ? a(  5 F>\( g( \x \ c $5 8(U  5  \ H5))wM) xFraunhofer Institute for Integrated Systems and Device Technology (IISB) AMD Saxony Manufacturing GmbH Atmel Rousset S.A. digital spirit GmbH Fraunhofer Institut fr Zuverlssigkeit und Mikrointegration (IZM) IMEC Infineon Technologies Dresden GmbH & Co. oHG M+W Zander Facility Engineering GmbH NMRC Philips Semiconductors B.V. s. team - semiconductor technology engineering and managementM    $ 2          { \\oo& \ Z5 1?yH  Project Coordinator: Partners: (p\2P !  6xH \ 0@޽h ? a( P( X   Z51? ~ Workpackages 2    hh88  ZԊ51?@X  ]6 workpackages Integration Process Technology Factory Automation and Operation Process and Metrology Equipment Environment, Safety and Health Management and Exploitation 82    {hh88   `451 ? 8(U -E-Learning for Microelectronics Manufacturing$.--  H  0@޽h ? a(c  h(  hm h T51?X wProcess Technology Factory Automation and Operation Process and Metrology Equipment Environment, Safety and Health xxw  {hh88  h TT51?i   !Responsible Partners for Content" 2" " hh88 h T51?  nSubjects 2   hh88 h Tt51?X  DIMEC, Belgium, for Process Technology M+W Zander, Germany, for Factory Automation and Operation IISB, Germany, for Process and Metrology Equipment NMRC, Ireland, for Environment, Safety and Health  *   {hh88 h  `x51 ? 8(U -E-Learning for Microelectronics Manufacturing$.--  H h 0@޽h ? a(S p( @ p0 p Ts51?X  consider didactics and educational needs compare, define and integrate technical platforms embed and implement contents of the workpackages 2 - 5 manage and support user-training and system implementation if decided link the E-LIMM system and contents to other projects e.g. LIMA  22     {hh88 p Ttw51?  ~Workpackage 1 Integration  hh88 p  `}51 ? 8(U -E-Learning for Microelectronics Manufacturing$.--  H p 0@޽h ? a( bZ(     Tz51?X_  the detailed definition of the content for the learning and training material in co-ordination with the microelectronics manufactures development of training and learning material with special emphasis on application for web-based learning platforms and the appropriate didactics requirements testing and reviewing of the material on a web-based platform in manufacturing environment for further improvement 2  {hh88  T{51? &Workpackage 2 - 5 Description of Work'' ' hh88   `|51 ? 8(U -E-Learning for Microelectronics Manufacturing$.--  H  0@޽h ? a( ]Ut( -5 t  t T{51?P !Workpackage 2 Process Technology"" " hh88 t  `t}51 ? 8(U -E-Learning for Microelectronics Manufacturing$.--   t T4{51?_  MGeneral Process Flow provide a basic understanding in the general process flow (FEOL and BEOL) Process Modules provide a basic understanding what the different process modules are, how they interact with each other, and how they can affect device behaviour Process Steps provide a more detailed insight in individual processing stepsdN 2J> N {hh88H t 0@޽h ? a( xO( $ x x TTy51? 0Workpackage 3 Factory Automation and Operation 11 1 hh88 x  `w51 ? 8(U -E-Learning for Microelectronics Manufacturing$.--   x Tu51? RFactory - Operation fab aspects, facility management in semiconductor production and efficiency engineering Factory Automation hard- and software automationR 2X    {hh88H x 0@޽h ? a(3  |s(  | | T4r51? /Workpackage 4 Process and Metrology Equipment 00 0 hh88 |  `Tv51 ? 8(U -E-Learning for Microelectronics Manufacturing$.--   | Tt51?\ wGeneral Aspects of Semiconductor Equipment current and future needs of semiconductor equipment (ITRS-Table), overview application of semiconductor equipment, equipment concepts and overview of related SEMI standards and their application Equipment automation components and sub-components and Interfaces Integration and Operation of equipment in a semiconductor manufacturing environment procurement and acceptance, ramp-up and operation, equipment test and monitoring, matching, maintenance and e-diagnostics, equipment reliability and performance, acquisition and improvement of reliability, availability, maintainability and process and equipment control  2+-T  {hh88H | 0@޽h ? a( rj0( c '  Tv51? -Workpackage 5 Environment, Safety and Health .--  hh88   `4x51 ? 8(U -E-Learning for Microelectronics Manufacturing$.--  z  TTs51?KP  Safety hazards, prevention of hazards, emergency preparedness and accident reporting and investigation Environmental environmental aspects and environmentally benign manufacturing EHS Regulations, Industry Standards, Agreements EHS Management System Health Hazards and First Aid 2_>/  {hh88H  0@޽h ? a(   M( @ ,  Tz1? *Workpackage 6 Management and Exploitation +*  hh88   `y1 ? 8(U -E-Learning for Microelectronics Manufacturing$.--    T4y1?X  <ensure the management of the project technical and financial reporting ensure the consistency of the work between partners and work-packages prepare a strategy for dissemination and use of project results" 2  {hh88H  0@޽h ? a(L 0  `( X   ` `  T1 ?pI+   5 `  `T5vJvJ ? T\     H ` 0:lZ ? a(  0 ( I X  C pI+   5  S t5 T\  5   H  0:lZ ? a(rd0" " GN(dT9s3BD*KVw\ahn0Q?uwr (`p( / 00DTimes New Roman0ԳԳ~0DArialNew Roman0ԳԳ~0" DWingdingsRoman0ԳԳ~00DFrutiger 55 Roman0ԳԳ~0"Oh+'0L4 LX |   Kein FolientiteleeinMarkus Pfefferlarkark9\\axp06\pfeffer\vorlagen\word 97\fhg\folien_quer_fhg.potPoiMarkus Pfeffer\285Microsoft PowerPoint 4.0wor@@"3@0lGXU@`8GKoZ  %$& &&#TNPP0 & TNPP &&TNPP     $A o(o`Eʦ """)))UUUMMMBBB999|PP3f3333f333ff3fffff3f3f̙f3333f3333333333f3333333f3f33ff3f3f3f3333f3333333f3̙33333f333ff3ffffff3f33f3ff3f3f3ffff3fffffffff3fffffff3f̙ffff3ff333f3ff33fff33f3ff̙3f3f3333f333ff3fffff̙̙3̙f̙̙̙3f̙3f3f3333f333ff3fffff3f3f̙3ffffffffff!___wwwݼ ݼݼܼݼݻݼܼݼ׼ݼּܼݼܼܶݼܼݵݼܼ׼׻׼ܼݻݶݵݶ ݶݻ׼ܼݼܼܼݼݼݼݻܼݼ ݼݻݼܼݼ ݻݻݼݼݼݻݼ ݻݶݼּݻ׼ּݼݼݼ׼ּݼܼ׼ݶּݶݶݶݼּݼݼܼݼݼܼݻ׻ݼݻݼݼݼݼ ݼݼݼܼݼݼܼݼ׼ּ ܼݵݵݶݵݼּ׼ݵݼ׻ݵݼݼݼݵܼ׻׼ܼܶݼݶܶݼݻݼݼݼݼݻݼ ݻݼݼܼݼ»ݼݼݼݻݻݼܼݼ׼׼ݶ׻ݼּݵݼ׻ݶݶܼ׼׼ݼݶ׼ݼ׼׻ܶݼݵܼݼݻݻݼݻݼݻݻݼݻݵݻݼ ݼܼݻ⼻ݻݼܼݼݼݼݼݻݻݻּܶ׼ݼݵݼּݼּּܼ׻ݶ׻ݼܶݼݵݼݼݼ ݼݼݼݼ⼼ݼݻݼݻݼݼܶݻݼ ݼ⼼ݼݼݼܼݼݼܼܼݼݼܶݼݼܼݼݶ ݻܶݼݼ׼׼ݼݶּ׼ݵݼݼ ܶݼݼݼ ݻݶ ݼݻݼݼܼݼݻݼݼ ݻݻݼݼݼݼݻݼ ݼݼݻݼ׼ݵݼݼݼܼ׻׼ݼݵݻּܼݼݻݼ׼ݼݼݼ ݻݻݼݼ ܼݼݼݻܼݵݼܼݻݼܼܼݼݼܼݼܼܼݼ ݻݼݼݼּܼݶܶ׼ݼݼݼݼݶ׼ݼݼ׼ݶ׼ ݼݼ ݻݼݼݼܼݼ ܼݼݼݼݼݻݻݼݼݼ⼼ݼݼ ݼݻݼݻݼ׼ݼݼ׼ݼ׻ּּ ּݶݵݼܶݶ׻׼ݵݼ ݻݻݼݼ ݼݼܼݼݻݼݼܼݼݻݼݼ ݼ ⼼ܼݻݼݻݻݼݻݶܼݻݻݼܶ׻׼ܼ׼ݶݶݼ ݶ׼׼ݼݶݼݻݼ ݼ ܼݼݻݼݻݼݻݼ׻ ݼܼݼ ݼܼݼݼܼݼ ݼݶ׼ݼݶݼ׻ݶּݼּ׼ݻ׻ݻ׼ݻݼݶݵݼݻݼݼ ݼܼݼ ݼݼݻܼݼ ݼ ݻݻݼ ݼܼݼݻݼܼݻݻݻܼܼ׼ܼݼ׼ܼܼ׼ּݵּݼ׼ܼݼݻݼݼ»ݼݼݼ¼ݼܼ ݼݼݻݼݻݼܼݼݻݼݼݼݼݼݼݼ׼ݻ׻׼ݶݼݼ׼ܼ׼׼ݼݼܼݼݼݼݼ¼ݼܼݼݼݻݼܼݼݼܼݼ ܼ ݼݻݻݼݵܼݼݶݼݻ׻ܼݻ׼ݶ׻ܼ׼ݶݶݼܼ ݼ ݼݼݼݻݻݼݼݻݼݻݻ ݼ»ݼݼ ݼܼݼݼּݼݻ׻ݻ׼ݼݼ׼׼ݼݼ׼ ׼ݶݼݼݼݻݼݼ ݻݻܼݼݼݼݼݼݻݼἼܼݼܼݼܼݻ ݼּܼݼ׼ּܼܶݵݵݼݻݼܼݼݼݼ ݼݻݻݼܼܼݼݻݻ⼼ݼݼݼݼּݻݼݶݻݶ׻ݶݼݼ׼׼ݶݼݶ׻ݼݻ׼ ݼݼ⼻ݼ ݼݼݼݼܼܼݼݼݻݼܼܼݼ ݻݻݼݼݵݼּݵּݶ׼׼ݶݻ׼ݼݼݼݻݼݻݻݻݼݻܼݼݻݼܼݼݼݻݼ ݼݼܼݼݼ׻ݶݻ׼ܼ׼ݼݶݻݼݼݼݼݼ¼ ݼݻݼݻݻݼݼݻݼݼݼݼܼ׼ݻݼ׻ݻݶݵ׻ݵݶݵܼ׻ּݼݼܼ ܼݼݼݼ ݻݼ»ݼݼݻݼ׼ݶܶݶݶ׼ܼݼݼݼܼܼܼܼݼݼݻݼݻݼܼݼݻݼݻݻݶݼ׻ݵּܼݶݻܼ׻ݼݵݼܼݻݼ ݼܼݼݻݼݻݻݼݼݻݻݻݼݶݻ׼׻׼ݻݶݼݼݼ ݼݼܼ ݼݼ⻼ ݼݼݼݻ׻׻ݶݵݻݻݼݻܼݼݼݼݼݻݻݼܼݻݼݼݼ¼⼻ݼݼݼݻݼݼݻݶ׼ܶ׼ݶݼݼݼݼݼݼݼݼ ݼݼݼ ݻݼݼܼݻݼݼݵݼܶݼݼݶݼݼݻݼݼ¼ݼݻݻ ݼݻݻݼݼݼݼݼݻݼܼ ݼݻݼݵ׼׼ݼݼݼݼܼݼݼݼݼݼݼݼݼݻݼݼ ݼἼܼ¼ܼݼݻݼ׼ּ׻ݼݼּݼݼݼ⼼ݼ¼ݼ»ܼݼܼݻݼݻ⼼ݻ Ἳݼݼּ׼ܼݶݶ׼׼ݵݼ׻ݼݼݼݼݼݼ ݻݻݼ ἼܼἼݼݼݻܼݶܶݻݼ׼ܼݼݼݼݼݼݼݼݼݻݼܼݼݼ ݻܼݼ⼼ݼݼּݶݵ׼ݼݻ ݼܼݼݼ⼼ݼݼݼݼݼݼݼݼ⼼ ܼݼݻݼݼݻݶ׼ݼݼݶݼݼݼݼݼݼ⼼ݼݻݼݼܼ⻼¼ݻݻּ׼ݵݶݼݼ׼ݶݼݶݻݼݼ¼ݼ޼ݼܼݻݼݼ ݼݼ⼼⼻ܼݼݼּܼݼݵݶּݼݼ׻ݼݼݼݼݼ¼޼޼ݼݼݼܼ ݼݻ»⼼ݻݻ׼ܶ׼ݶݶݼݼݻݼݼ ¼¼ܼݼݼܼ׼ݼ׼ܼݼݼݼݼݼݼݼ¼ݼݼݼ ⼼ݻݼݶݶݼ׼׼ݻ׼׻ݼݼݼݼݼݼ⻼ݼܼݼἻݼ׼ ݵݻ׼ݵݶݶݼݼݼ׼ݼݼݼ½ݼݼݼܼݻ⼻ݼݼּ׻׼ݵܼݻ׼ּݼݼݽݼݼm񼼼޼ݼݻݼ¼ݼ׼׼׼׻ݶ׼׼ ݶ׻׼ݵݼlݼݻݼ⼼ݼݻ ּ׼ݼݶܼݼݼݼݼݻl⼼޼ݻ⻼ݼݼݼݻݵܼ׼׼ݶݻ׼ݼ׼ ׼ּݼܼݼݼݻܼݻ mݼݼݼݼܶ׼ݶ׼ݼ׼ݶݼݻ׼ݼݻݼݼֻֻּݼݼݼݼݼܼݼ׻׻ܼܼݻݵݼ׼ּݻݼ ݼݼݼݼݵܼݼlݽ¼⼼ݼ׻ݼܶ ݵݼݼݼ׼׼ݼݼ ݼݼݼݻܶݻ ݼݼݼݼݼ¶׼ּ׻ݶݼּܼݵݵ׻ݻݻݶݻݼ ݻݼݻݻܼݼݻݼmݻݼݼּܶݻּ׻ּ׼׻ݼ׼ݼݶݼݼݼݼݼ ݵݼݼܒmݼݼ⼼׼ּ׼ ݶݵݼݶּݼ ݻݼݼݼݻݼݼݼ»ݼݼݼݑܼݼݼݵ׻׻׻׼׻ּݼݶݼݼݻݼݼݼݼݼݻݻݼݻݻlݼݻܼݻݶ׼׻ݶݻݶܼ׼׼ ݶݶݼݼݼݼݼݼݼݼݻݼݼ»ݼ⼼ݼݼ׼׻ּݼ׼ݵݼ׼ݶݻݼݼݼݼݼݼݼϼϼݼl޼¼ݻݻݼּּݶݵ׼ݻݵݵּݼݶ׼ݼ޼ݼ⼻⼑ϼϼݻݻݼݼݶ׼ݶݼ׻׻ݶݼݼݵݶݶݼݶݼݼݼݼ񼼼ݼϮ ¼ܼ׻ܶݼ׻ּݵ׼ݵݻ׼ܼݵݼݼݼݼݼݼ¼ݵϋϮ⵮ϑϋܼ¼¼ݼ ׼ݼݶݼ׻ݼݼݻݶݼ׼ݼݼݼݼݽݼ Ϯݑܼmܼݼ׼ݼݶݼּܼ׼׻ݼݼ׼ݼݼ޼ݽݼ񼼻ݼݼݼݮϋݼݶݼ׻ݶּܼܶݻݻ׼׼ݼݼ޼ݼݽݼݻݽû⼵½Ἴݻ׼ݵݼ׻ݼ ݶܶ׼ݼݼݼݶ׼ݼݽݼݽݼ񼼼⽼⻼⻼ܶ׼ݶݼݶݶݼܼݶݼݼݼݽݼݼݼݻ¼ݼݶݼּݵݼݻݶݼݶݶݶݼ׼ݼݼݼݼݽ޼ݼ¼ݼݻݼݼ¼¼ܼݻ׼ݶ׻ݶݼ׻ݻݼݶݼݼݶݼݼݽݼݼݽݼ⻼¼ݼ׼ݼּּܼݼݼݼݵݶݼݼݶݼݼݼݼݽݼݼݻݼ¼ݼܼݶ׼׼׼ݵݼݶݵݼݼݶݼݼݽݼݽ޼ݽݼݼݼ¼¼⼼ݼܼݼݼܼݼּݶݼݼ׼ݵݶݼݼݼݼݼݽݼݼݼݼݼݽ½½ݼἼݻݼ׼ݼ ݼݶ׼ݼ׼ݼݼݶ׼ݼݼݼݼݼ޼ݽݽ¼⼼ݼ ּݶݶݶݶ׼ݼܼݶݼݼݼݼݼݼݼݼݼݼݼݽ⼽ݻݼݼּܼݶ׻ܼܼ׼׼ݻݼݼ׼ݼݼݼݶݼݼ޼ݼݼܼ ܼݶݼݼݼ׼ݻ׼ݼݼݼݼݼݼݶ׼ݼݼݼݼݽݽ޽ݼݼݻܶݻݵܼ׼׼ݼ׼ݼݼݼݶݼݼݶݼݶݼݽݽݽݼ¼ܼݼݼݼ׼ݶܼ׻ݼݼݼݶݼ»⼼ݻݻּݻݻ׻ݶܼݻ׼ݶݼݼ׼ݼ׼ݼݼݼݼݼݽݻݶݼݶܼݶݼ׼ݼܼ׼ݼ׼׻ݼ׼ݼݶݼݼݽ½¼ݻ ׻ݼݶݻݶݵݻ׼׼ݼݼ׼ݼݶݶݼݼݼݽݽݽܼܼݼܼݵּ׼ݼ׼ݼ׼ݼݼ׼ݼܼݻݼݼݼݼݼݼݻݼݼ׼ݶ ݶּݶݼݼݼ׼ݼݼݶݼݼݼݼݽ޼ݽ½ܼ»ܼ⻼ݼݻݻݻܶݻݼּݻݵݶݼݼݶݼݼݼݶݼݽ޼ݼݽü» ݼݼݼ׼ݵ׼ݼݶݼݼ׻ݼݶܼ׼ݼݼݼ޼ݼݼݼ½»ݼ¼ݼݼݻ׻ݻ׼ݼ׻ݵݶݼݼݶݼݼݶݼݼݼݼݽݻݼܼݼݶݼܶݼݼݻݻ׻׼׻ݼݼݼݼݶݼݽݽܼݼݻݼ ܼݻ׼ ׻ݶݶݼݻݼݼ׼ݶݼݼݼ½½ݼݽ⽼ ׼½ݽ⼼ ܼ׼ݼݼݽ޼½½¼ݼݻ ܼ ܼܼݵݻݶܼݵݼݼ׻ݼݼ׼ݼݼݼ⼽¼ݻݼ ݼ׼ݼݻݼݶݻ׼ݼּ׼ݼ׼ݼݽݽ½ݽ½¼ܼݼݼݶݶܼ׻ܼ׼ܶ׼ݻ׼ݼݼݽݽݼݽݼ½½¼׼ݽ¼޼ݼݽ޽ݽݼݽݼݻݻݼݼݽ޼»ݼݼܼܼݼݶݼݼ׼׼ݼݼݼݽݽ޼ݼݽݼݼݼݼݻݻݻݼݼݼݼݼ׼ݼ׼ݼݼ׼ݼݼݼݼݽݼݼݼݽݽ޼ݽܼܼݼݼܼݼܼݼݼݼܼܼݼ׼ݼݼݼݶݶݼݼݼݼݼݼݼݽݽݽݽݼݼݻݼݼݻݼܼ ݼݼݵݼݼݼݶݼݼݼݼݼ޼ݼݼݼݽݼݽݽݽݽݽݽ޼ݼܼݼܼݼݼݼݼݼ׼׼ݶݼݼݼݽݼݼݼݼ޼ݽݽݽ޼ݼݼݼܼݼݻܼݼ ݻݼݼݼݼݼݼݼݽ޼ݽ޼ݽݽݽݼ޼ݼ޼ݽݼݼݻ ݼݼܼݼݻݶݼݼݼݼݼݼݼݼݽݼݼݽݽ޼ݼݼݽݼݼݼݼ⼼ ׼ܼݼݼݼ޼ݼݽݼݼݼݽݼݼ޼ݼݼݽݼ޼ݼݼݼݼݽݻݼݼݼ޼ݼ޼ݼݼݼܼݼݼܼݼ ݼ ݻݼݼ ݼݼ޼ݼݼݼݼݼݼݼݼݽݼݼݽݽݽ޼ݼݼݼݼݼݼܼ⻼ݻݼݼݼݻݼݻ ݼݼݼ޼ݼݼݼݽݼݼ޼ݼ޼ݼ޼ݽݽݼݽ޼ݼݼݼݽݻݼݼݻݼݼݼ ݼݼݻݼݻݽݽݼݼݼݼݽݼ޼ݼݼݼݼݼݼݼݽݽ޼ݽݽݼݼݼݼݼݼ»ܼݼܼݼܼܼݼݽݼݼݼݼݼݼݼݼݼݼݼݼݼݼݼݼݼݽݼݽݽݼݼݽݼݽݼ»ݼݼݼݼݻݼݻݻݼݽݼ޼ݼݼݼݶݼݼݼݼݼݼ׼ݼݼݼݼݼ޼ݽݽݼݽݽݽݼݽݼݼݼݼݼݼ⼻ܼݻἼݻܼݻݼݽݼݼݼݼݶݼݼݼݶݼݼݶݼݼݼݼ޼ݼݼݼ޼ݼ ݼݼݼݼݼݼ޼ݼݼݼݼݼݼݼݼݶݶݼݶݵݼݼݼݼݼݼ޼ݼݼݼݽݽݽݽ޼ݼ¼ܼἼݼ޼ݼݼݼݼݼݼݶݼ׼ܼ׼ݼݼݼݼ׼ݼݼ޼ݼݼݼ޼ݽݽ⼼⼼ݼݼݼݼݼݼݼݶݼݶݼ ݼݼݼݼݽݼݽݽݼݼݼݼݼݼݼ׼ݼ׼ݶݼ׼ݼݼݼݼ޼ݽݼݼݻݼݼݼݶݼ ּݼ׼ܼݼݼݼݶݼݽ޼ݼ޼ܼܼܼ ܼἼ¼ݼݼݼݼݼݼݶּ׼׼ݼݶ׼ݶ׼ݶݶݼݼݼݼݽݼ޼ݽ޼ݼݼݼݼݼݼݼݼݼݼݼݼݼݽ--&TNPP &oman0ԳԳ~0DArialNew Roman0ԳԳ~0" DWingdingsRoman0ԳԳ~00DFrutiger 55 Roman0ԳԳ~0" hh88 @n?" dd@  @@`` ov$ %               ?R$:D`MC__0$b$pZS홷QS ~1?PY!@8> g4FdFd~0سl ppp<4BdBd\ g4%d%d~0س> p p? 5O =GcE-LIMM E-Learning for Microelectronics Manufacturing IST-project (IST 2001-34828) founded by the EC d5/c   h fd-E-Learning for Microelectronics Manufacturing$.--   gi j k l mn/8ePrbRoot EntrydO)pTۃDD Pictures*Current User%.SummaryInformation(M !"#$%&'()*+,-./0123456789:;<=>?@ABEFG  !"#$*http://www.e-limm.org/extern/workpack.htm*http://www.e-limm.org/extern/workpack.htm&_Markus PfefferRoot EntrydO)2؃DD Pictures*Current User%.SummaryInformation(M !"#$%&'()*+,-./0123456789:;<=>?@ABEFG  !"#$*http://www.e-limm.org/extern/workpack.htm*http://www.e-limm.org/extern/workpack.htm&_Markus Pfeffer  !"#$%&'()*+,-./0123456789:;<=>?@ABCDEFGHIJKLMNOPQRSTUVWXYZ[\]^_`abcdefghijklmnopqrstuvwxyz{|}~ !"#$%&'()*+,-./0123456789:;<=>?@ABEFGHRoot EntrydO)`8D Pictures*Current User%.SummaryInformation(MPowerPoint Document(4DocumentSummaryInformation8  hh88 @n?" dd@  @@`` ov$ %               ?R$:D`MC__0$b$pZS홷QS ~1?PY!@8> g4FdFd~0سl ppp<4BdBd\ g4%d%d~0س> p p? 5O =GcE-LIMM E-Learning for Microelectronics Manufacturing IST-project (IST 2001-34828) founded by the EC d5/c   h fd-E-Learning for Microelectronics Manufacturing$.--   gi j k l mn/8eP  ` ̙33` 3` 3333f` 999MMM` f` f3` 3R?" d>8!?" dnP8!e -dh% ~(l - ou n?" dd   @@``PLg h l o u`p@u@ua0  #q(  p # C HA0I:\e_limm\pic\bgpic.jpg`    `v1 ?{]U  a-Klicken Sie, um das Titelformat zu bearbeiten. .XB @ 01?w'$w  Ztx$֏$֏1?v FhG IISB February 20030n  }c l   `}''1?X" \  **TTXB @ 01?'$R  ZTz1 ?)   dKlicken Sie, um die Formate des Vorlagentextes zu bearbeiten Zweite Ebene Dritte Ebene Vierte Ebene =    e   C ZABI:\e_limm\e-limm_logo300x166.gifTa ^H  0@޽h? ? a( &folien_quer_fhg.pot a +#` (   p  C HA0I:\e_limm\pic\bgpic.jpg`  T{ ?]  a-Klicken Sie, um das Titelformat zu bearbeiten. .rB  @ <0*?]"  T4v ?]   f2Klicken Sie, um das Untertitelformat zu bearbeiten3 3  C ZABI:\e_limm\e-limm_logo300x166.gif  H  0@޽h? ? a(a 5 4,P(     `t{ ? ]  dB @ <+*? ] dB @ <+*?/]/H  0@޽h ? a(Aa pl](  l6 l TT}1?X JProject founded by the European Community (Contract number IST-2001-34828)K 2K K {hh88 l T51?  mProject 2  hh88 l ZT51?  jGoal 2  hh88 l Z451?` X  3The application of information technology and especially multimedia learning content included in networked systems for training and further education for the staff in microelectronics manufacturing  hh88 l  `451 ? 8(U -E-Learning for Microelectronics Manufacturing$.--    l Tԇ51?X  June 2002 - May 2005 (36 Months)! 2! ! {hh88H l 0@޽h ? a(Ea dm( 6 p d d TT51? ( To address the shortage of highly skilled staff in the industry for microelectronics manufacturing by development of skills. It covers the set-up and demonstration of new schemes, modules and courses for education, learning and training for industrial staff from freshmen to mid-career staff to be retrained. The target groups are operators, technicians, engineers and managers. Web-based learning and training platforms will be applied. Focus is on industry-driven actions adjusted to the requirements of the daily work in a factory.  2  {hh88 d  `51? vGeneral Objectives  hh88 d  `ԍ51 ? 8(U -E-Learning for Microelectronics Manufacturing$.--  H d 0@޽h ? a( a 5 F>\( g( \x \ c $5 8(U  5  \ H5))wM) xFraunhofer Institute for Integrated Systems and Device Technology (IISB) AMD Saxony Manufacturing GmbH Atmel Rousset S.A. digital spirit GmbH Fraunhofer Institut fr Zuverlssigkeit und Mikrointegration (IZM) IMEC Infineon Technologies Dresden GmbH & Co. oHG M+W Zander Facility Engineering GmbH NMRC Philips Semiconductors B.V. s. team - semiconductor technology engineering and managementM    $ 2          { \\oo& \ Z5 1?yH  Project Coordinator: Partners: (p\2P !  6xH \ 0@޽h ? a(4a P( X   Z51? ~ Workpackages 2    hh88  ZԊ51?@X  ]6 workpackages Integration Process Technology Factory Automation and Operation Process and Metrology Equipment Environment, Safety and Health Management and Exploitation 82    {hh88   `451 ? 8(U -E-Learning for Microelectronics Manufacturing$.--  H  0@޽h ? a({a  h(  hm h T51?X wProcess Technology Factory Automation and Operation Process and Metrology Equipment Environment, Safety and Health xxw  {hh88  h TT51?i   !Responsible Partners for Content" 2" " hh88 h T51?  nSubjects 2   hh88 h Tt51?X  DIMEC, Belgium, for Process Technology M+W Zander, Germany, for Factory Automation and Operation IISB, Germany, for Process and Metrology Equipment NMRC, Ireland, for Environment, Safety and Health  *   {hh88 h  `x51 ? 8(U -E-Learning for Microelectronics Manufacturing$.--  H h 0@޽h ? a(ka p( @ p0 p Ts51?X  consider didactics and educational needs compare, define and integrate technical platforms embed and implement contents of the workpackages 2 - 5 manage and support user-training and system implementation if decided link the E-LIMM system and contents to other projects e.g. LIMA  22     {hh88 p Ttw51?  ~Workpackage 1 Integration  hh88 p  `}51 ? 8(U -E-Learning for Microelectronics Manufacturing$.--  H p 0@޽h ? a(a bZ(     Tz51?X_  the detailed definition of the content for the learning and training material in co-ordination with the microelectronics manufactures development of training and learning material with special emphasis on application for web-based learning platforms and the appropriate didactics requirements testing and reviewing of the material on a web-based platform in manufacturing environment for further improvement 2  {hh88  T{51? &Workpackage 2 - 5 Description of Work'' ' hh88   `|51 ? 8(U -E-Learning for Microelectronics Manufacturing$.--  H  0@޽h ? a(a ]Ut( -5 t  t T{51?P !Workpackage 2 Process Technology"" " hh88 t  `t}51 ? 8(U -E-Learning for Microelectronics Manufacturing$.--   t T4{51?_  MGeneral Process Flow provide a basic understanding in the general process flow (FEOL and BEOL) Process Modules provide a basic understanding what the different process modules are, how they interact with each other, and how they can affect device behaviour Process Steps provide a more detailed insight in individual processing stepsdN 2J> N {hh88H t 0@޽h ? a('a xO( $ x x TTy51? 0Workpackage 3 Factory Automation and Operation 11 1 hh88 x  `w51 ? 8(U -E-Learning for Microelectronics Manufacturing$.--   x Tu51? RFactory - Operation fab aspects, facility management in semiconductor production and efficiency engineering Factory Automation hard- and software automationR 2X    {hh88H x 0@޽h ? a(Ka  |s(  | | T4r51? /Workpackage 4 Process and Metrology Equipment 00 0 hh88 |  `Tv51 ? 8(U -E-Learning for Microelectronics Manufacturing$.--   | Tt51?\ wGeneral Aspects of Semiconductor Equipment current and future needs of semiconductor equipment (ITRS-Table), overview application of semiconductor equipment, equipment concepts and overview of related SEMI standards and their application Equipment automation components and sub-components and Interfaces Integration and Operation of equipment in a semiconductor manufacturing environment procurement and acceptance, ramp-up and operation, equipment test and monitoring, matching, maintenance and e-diagnostics, equipment reliability and performance, acquisition and improvement of reliability, availability, maintainability and process and equipment control  2+-T  {hh88H | 0@޽h ? a(a rj0( c '  Tv51? -Workpackage 5 Environment, Safety and Health .--  hh88   `4x51 ? 8(U -E-Learning for Microelectronics Manufacturing$.--  z  TTs51?KP  Safety hazards, prevention of hazards, emergency preparedness and accident reporting and investigation Environmental environmental aspects and environmentally benign manufacturing EHS Regulations, Industry Standards, Agreements EHS Management System Health Hazards and First Aid 2_>/  {hh88H  0@޽h ? a(%a  M( @ ,  Tz1? *Workpackage 6 Management and Exploitation +*  hh88   `y1 ? 8(U -E-Learning for Microelectronics Manufacturing$.--    T4y1?X  <ensure the management of the project technical and financial reporting ensure the consistency of the work between partners and work-packages prepare a strategy for dissemination and use of project results" 2  {hh88H  0@޽h ? a(rXbx ܄Gd֥fܰ@_q ҽ>xr (`p( / 00DTimes New R  !"#$՜.+,D՜.+,l     A4-Papier (210x297 mm) FhG-IIS-B(24f 1 Times New RomanArial WingdingsFrutiger 55 Romanfolien_quer_fhg.potdE-LIMM E-Learning for Microelectronics Manufacturing IST-project (IST 2001-34828) founded by the ECKein FolientitelKein Folientitel.E-Learning for Microelectronics ManufacturingKein FolientitelKein FolientitelKein FolientitelKein FolientitelKein FolientitelKein FolientitelKein FolientitelKein FolientitelKein Folientitel Verwendete SchriftartenDesignvorlage Folientitel \(RZ _PID_GUID _PID_HLINKSAN{8040A142-6411-11D7-97BC-005004982ED8}A<http://www.e-limm.org/http://www.e-limm.org/http://www.e-limm.org/http://www.e-limm.org/http://www.e-limm.org/*http://www.e-limm.org/extern/workpack.htm*http://www.e-limm.org/extern/workpack.htm*http://www.e-limm.org/extern/workpack.htm